Image sensor and image sensor module
An image sensor is provided that can be made compact, low power consuming, and operative at high speed without degrading image quality and read-out speed. The image sensor includes a pixel cell having a photo diode 31 and a reset transistor 32 connected to a power supply, a detection transistor 33 for detecting the signal voltage of the photo diode 31 , a selection transistor 34 for selecting the detection transistor 33 and reading the signal voltage therefrom; a peripheral circuit 12 having MOS transistors; and an input/output circuit 13 having MOS transistors. The gate dielectric films 60 A of the reset transistor 32 and the detection transistor 33 are formed thicker than the gate dielectric film of the selection transistor 34.
1. An image sensor, comprising:
a reset transistor;
a photo diode;
a transfer transistor serially connected between said reset transistor and said photo diode;
a detecting transistor, a gate of which is connected to a diffusion region connecting said reset transistor and said transfer transistor;
a selecting transistor that selects said detecting transistor; and
a peripheral transistor constructing a peripheral circuit;
wherein
a gate dielectrics of said transfer transistor is thicker than a gate dielectrics of said reset transistor, said detection transistor, and said selection transistor.
2. The image sensor as claimed in claim 1 , wherein phosphorus is injected into a drain region of said transfer transistor.