Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device and a method for fabricating the same in which a protective oxide layer is formed on an insulating interlayer gap are disclosed. An example semiconductor device includes a semiconductor substrate having lower structures, an insulating interlayer on the semiconductor substrate to cover the lower structures, and an SiH 4 -oxide layer on the insulating interlayer. The SiH 4 -oxide has hydrogen constituents removed by displacement to prevent an amorphous material layer from being formed on the insulating interlayer. The example semiconductor device includes a contact hole in the insulating interlayer and the SiH 4 -oxide layer for exposing predetermined portions of the lower structures. Additionally, the example semiconductor device includes a contact plug formed inside the contact hole to electrically connect the lower structures with a metal line.
1. A method for fabricating a semiconductor device comprising:
forming an insulating interlayer on a semiconductor substrate having lower structures;
forming an SiH 4 -oxide layer containing hydrogen therein on the insulating interlayer;
removing hydrogen constituents from a surface layer of the hydrogen-containing SiH 4 -oxide layer;
forming a reflection prevention layer on the SiH 4 -oxide surface layer having hydrogen constituents removed therefrom;
forming a contact hole by selectively removing the insulating interlayer, the SiH 4 -oxide layer containing hydrogen, the SiH 4 -oxide surface layer having hydrogen constituents removed, and the reflection prevention layer, for exposing predetermined portions of the lower structures; and forming a contact plug inside the contact hole.
2. The method of claim 1 , wherein removing the hydrogen constituents from the SiH 4 -oxide layer comprises reacting an O 3 -containing solution with the SiH 4 -oxide layer.
3. The method of claim 2 , wherein reacting the O 3 -containing-solution with the SiH 4 -oxide layer is performed for 8 to 12 minutes.
4. The method of claim 2 , wherein the O 3 -containing solution contains O 3 at a percentage between 3% and 10%.
5. The method of claim 1 , wherein removing the hydrogen constituents from the SiH 4 -oxide layer comprises reacting an O 3 -containing gas with the SiH 4 -oxide layer.
6. The method of claim 5 , wherein the O 3 -containing gas is provided in an in-situ process of targeting the SiH 4 -oxide layer.
7. The method of claim 5 , wherein reacting the O 3 -containing gas with the SiH 4 -oxide layer is performed for 20 to 30 seconds.
8. The method of claim 5 , wherein the O 3 -containing gas comprises O 3 at a percentage between 3% and 10%.
9. The method of claim 1 , wherein forming the insulating interlayer comprises depositing BPSG.
10. The method of claim 1 , wherein forming the insulating interlayer comprises depositing FSG.
11. The method of claim 1 , wherein forming the insulating interlayer comprises a high-pressure CVD process.
12. The method of claim 1 , further comprising planarizing the insulating interlayer.
13. The method of claim 1 , further comprising polishing the insulating interlayer.
14. The method of claim 1 , wherein forming the SiH 4 -oxide layer comprises an SiH 4 -CVD process.
15. The method of claim 1 , wherein forming the contact plug comprises depositing tungsten in the contact hole.