Method for forming silicide film in semiconductor device
View Patent ↗Method for forming a silicide film in a semiconductor device, including the steps of forming a silicide suppressing film on a silicon substrate, patterning the silicide suppressing film by chemical dry etching, forming a metal film on an entire surface of the silicon substrate inclusive of the silicide suppressing film pattern, performing a heat treatment to form a silicide film on a portion of the silicon substrate opened from the silicide suppressing film pattern, and removing a portion of the metal film not turned into the silicide, thereby forming the silicide suppressing film pattern accurately and minimizing etch damage caused by plasma, to improve process yield of the semiconductor device, substantially.
1. A method for forming a silicide film in a semiconductor device, comprising the steps of:
forming a silicide suppressing film on a silicon substrate;
dry etching the silicide suppressing film by supplying CF 4 gas at a flow rate of from about 40 sccm to about 100 sccm at pressure of from about 30 Pa to about 40 Pa while applying a power of from about 300 W to about 600 W, and supplying O, gas at a flow rate of from about 100 sccm to about 300 sccm while applying a power of from about 50 W to about 100 W to form a silicide suppressing film pattern;
forming a metal film on a surface of the silicon substrate inclusive of the silicide suppressing film pattern;
heating the silicon substrate to form a silicide film on a portion of the silicon substrate exposed by the silicide suppressing film pattern; and
removing a remaining portion of the metal film.
2. The method as claimed in claim 1 , wherein the silicide suppressing film comprises a silicon oxide film or a silicon nitride film.
3. The method of claim 1 , wherein no bias voltage is applied to the semiconductor substrate during the dry etching step.
4. A method for forming a silicide film in a semiconductor device, comprising the steps of:
forming a silicide suppressing film on a silicon substrate;
dry etching the silicide suppressing film by supplying a fluorocarbon etchant at a flow rate or from about 40 sccm to about 100 sccm at a pressure of from about 30 Pa to about 40 Pa while applying a power of from about 300 W to about 600 W, and supplying O 2 gas at a flow rate of from about 100 sccm to about 300 sccm while applying a power of from about 50 W to about 100 W to form a silicide suppressing film pattern;
forming a metal film on a surface of the silicon substrate and the silicide suppressing film pattern;
heating the silicon substrate to form a silicide film on a portion of the silicon substrate exposed by the silicide suppressing film pattern; and
removing a remaining portion of the metal film.
5. The method of claim 4 , wherein the fluorocarbon etchant comprises a compound of the formula C a H b F c , where a is from 1 to 3, c≧3, and (b+c)=(2a+2).
6. The method of claim 5 , wherein c≧4.
7. The method of claim 4 , wherein the silicide suppressing film comprises a silicon oxide film.
8. The method of claim 7 , wherein the silicide suppressing film comprises SiO 2 .
9. The method of claim 4 , wherein the silicide suppressing film comprises a silicon nitride film.
10. The method of claim 4 , further comprising forming a photoresist pattern on the suicide suppressing film prior to dry etching the silicide suppressing film.
11. The method of claim 4 , further comprising removing the remaining silicide suppressing film after a remaining portion of the metal film has been removed.
12. The method of claim 4 , wherein the metal film comprises a rare earth metal film.
13. The method of claim 12 , wherein the rare earth metal comprises tungsten.
14. The method of claim 12 , wherein the rare earth metal comprises titanium.
15. The method of claim 12 , wherein the rare earth metal comprises cobalt.
16. The method of claim 12 , wherein the metal film comprises a tungsten film, a titanium film, or a cobalt film.
17. The method of claim 4 , wherein the silicide film comprises tungsten silicide.
18. The method of claim 4 , wherein the silicide film comprises titanium silicide.
19. The method of claim 4 , wherein the silicide film comprises cobalt silicide.
20. The method of claim 4 , wherein no bias voltage is applied to the semiconductor substrate during the dry etching step.