Semiconductor device and fabricating method thereof
View Patent ↗A semiconductor device and fabricating method are provided, by which device drivability can be increased by forming second LDD regions after isolating first LDD regions from source/drain regions to prevent heavily doped impurities therein from diffusing into the first LDD regions and to provide stepped densities within the LDD regions. The method includes the steps of stacking oxide and conductive layers on a semiconductor substrate, forming a gate electrode by patterning the conductive layer, etching the exposed substrate to a first depth, forming a first LDD region in the etched substrate, forming a spacer on a sidewall of the gate electrode, forming a source/drain region in the substrate having the spacer, etching the substrate having the source/drain region to a second depth, and forming a second LDD region between the first LDD region and the source/drain region of the etched substrate.
1. A semiconductor device comprising:
first LDD regions and source/drain regions in a semiconductor substrate comprising a first step having a height equal to or smaller than 500 Å and a second step adjacent to the first step, the second step having a height equal to or smaller than 500 Å;
a channel region between the first LDD regions;
a gate insulating layer on the semiconductor substrate over the channel region;
a gate electrode on the gate insulating layer over the channel region;
a spacer on a sidewall of the gate electrode; and
second LDD regions provided between the first LDD regions and the source/drain regions, wherein the semiconductor substrate has a shape adapted to separate the first LDD regions from the source/drain regions.
2. The semiconductor device of claim 1 , wherein the second LDD regions have an impurity density higher than that of the first LDD regions but lower than that of the source/drain regions.
3. The semiconductor device of claim 1 , wherein the channel region is defined at least in part by the first step.
4. The semiconductor device of claim 1 , wherein the first LDD regions are partly in the first step and partly in the second step.
5. The semiconductor device of claim 4 , wherein the second LDD regions are not in the first step, but partly in the second step.
6. The semiconductor device of claim 5 , wherein the source/drain regions are not in either the first step or the second step.
7. A method of fabricating a semiconductor device, comprising the steps of:
stacking an oxide layer and a conductive layer on a semiconductor substrate;
forming a gate electrode by patterning at least the conductive layer;
etching the substrate exposed by the patterned gate electrode to a first depth;
forming a first LDD region in the etched substrate;
forming a spacer on a sidewall of the gate electrode;
forming a source/drain region in the substrate having the spacer;
etching the substrate having the source/drain region to a second depth; and
forming a second LDD region between the first LDD region and the source/drain region of the etched substrate.
8. The method of claim 7 , wherein the semiconductor substrate is etched to the first depth using an etch mask for forming the gate electrode.
9. The method of claim 7 , wherein the first depth is equal to or smaller than 500 Å.
10. The method of claim 7 , wherein the substrate is etched to the second depth using the gate electrode and the spacer as an etch mask.
11. The method of claim 7 , wherein the second depth is greater than the first depth.
12. The method of claim 7 , wherein the second depth is equal to or smaller than 500 Å.
13. The method of claim 7 , wherein the second LDD region has an impurity density higher than that of the first LDD region but lower than that of the source/drain region.
14. The method of claim 7 , wherein the second LDD region is formed by ion implantation at an implantation angle of from 10° to about 80°.