Microelectronic fabrication system components and method for processing a wafer using such components
View Patent ↗A process chamber is provided which includes a gate configured to align barriers with an opening of the gate and an opening of the process chamber such that the two openings are either sealed or provide an air passage to the chamber. A method is provided and includes sealing an opening of a chamber with a gate latch and exposing a topography to a first set of process steps, opening the gate latch such that an air passage is provided to the process chamber, and exposing the topography to a second set of process steps without allowing liquids within the chamber to flow through the air passage. A substrate holder comprising a clamping jaw with a lever and a support member coupled to the lever is also contemplated herein. A process chamber with a reservoir arranged above a substrate holder is also provided herein.
1. A method for processing a microelectronic topography within a process chamber, comprising:
moving a sealed reservoir containing a process fluid proximate to a substrate holder upon which the microelectronic topography is arranged, wherein the step of moving the sealed reservoir comprises aligning a hatch of the reservoir with the microelectronic topography, and wherein the hatch comprises an ion permeable synthetic membrane and a shutter window;
opening the shutter window such that ions with the process fluid may be distributed upon the microelectronic topography through the ion permeable synthetic membrane; and
raising the hatch within the reservoir to dispense the process fluid onto the microelectronic topography.
2. The method of claim 1 , further comprising rotating the hatch within the reservoir.
3. The method of claim 2 , wherein the step of raising the hatch comprises raising the hatch to a level mid-way within the reservoir, and wherein the method further comprises sustaining the hatch at the mid-way level while rotating the hatch.
4. The method of claim 1 , further comprising opening one or more valves arranged within the hatch to dispense the process fluid onto the microelectronic topography.
5. The method of claim 4 , further comprising:
recoupling the hatch to the reservoir; and
backflowing process fluid arranged upon the microelectronic topography through the valves upon recoupling the hatch to the reservoir.
6. The method of claim 5 , further comprising moving the reservoir away from the substrate holder subsequent to recoupling the hatch to the reservoir.
7. The method of claim 1 , wherein the step of moving the sealed reservoir comprises moving the sealed reservoir to be in contact with the substrate holder.