Membrane probing system
View Patent ↗A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
1. A method of constructing a membrane probe comprising:
(a) creating a depression in a substrate having a geometry substantially pyramidal in shape, wherein said substrate has a crystal grain and said depression has at least one substantially flat surface inclined relative to said crystal grain, said surface and said crystal grain defining an acute angle therebetween;
(b) locating conductive material within said depression, a conductive trace electrically connected to said conductive material, and membrane supporting said conductive material;
(c) removing said substrate from said conductive material; and
(d) roughening an outer surface of said conductive material.