Forming a carbon layer between phase change layers of a phase change memory
View Patent ↗A carbon containing layer may be formed between a pair of chalcogenide containing layers of a phase change memory. When the lower chalcogenide layer allows current to pass, a filament may be formed therein. The filament then localizes the electrical heating of the carbon containing layer, converting a relatively localized region to a lower conductivity region. This region then causes the localization of heating and current flow through the upper phase change material layer. In some embodiments, less phase change material may be required to change phase to form a phase change memory, reducing the current requirements of the resulting phase change memory.
1. A method comprising:
forming a carbon containing layer between and contacting a first and a second chalcogenide containing layer, said first chalcogenide containing layer being part of a select device and said second chalcogenide layer being part of a memory element.
2. The method of claim 1 including forming said carbon containing layer entirely of carbon.
3. The method of claim 2 including forming said carbon containing layer by sputtering.
4. The method of claim 1 including forming said first chalcogenide containing layer of different material than said second chalcogenide containing layer.
5. The method of claim 1 wherein only said second chalcogenide containing layer changes phase between amorphous and crystalline phases.
6. A method comprising:
causing a carbon containing layer between and contacting a first chalcogenide containing layer and a second chalcogenide containing layer to change phase, said first chalcogenide containing layer being part of a select device and said second chalcogenide containing layer being part of a memory element.
7. The method of claim 6 including passing current through said carbon containing layer to change its phase.
8. The method of claim 6 including forming a filament in one of said pair of chalcogenide containing layers, and using said filament to change the phase of said carbon containing layer.