Thin film device active matrix by pattern reversal process
View Patent ↗This invention provides a method of fabricating an active matrix of thin film devices through a pattern reversal self aligned imprint lithography (SAIL) process. The method includes providing a substrate and depositing at least one layer of material upon the substrate. A pattern is then established upon the layer of material, the pattern providing at least one exposed area and at least one covered area of the layer of material. The exposed areas are treated to provide etch resistance to the material and reverse the pattern. Subsequent etching removes the etch susceptible material, the etch resistant material remaining. A thin-film stack is then deposited upon the remaining etch resistant material. These deposited thin-films are then processed in accordance with the desired characteristics of the thin film devices.
1. A method of fabricating an active matrix of thin film devices, comprising:
providing a substrate; and
utilizing a self-aligned imprint lithography (SAIL) process with pattern reversal to form an active matrix array of thin film devices.
2. The method of claim 1 , wherein the substrate is flexible.
3. The method of claim 1 , wherein the method is performed as a roll-to-roll process.
4. The method of claim 1 , wherein the thin film devices are thin film transistors.
5. The method of claim 1 , wherein the SAIL process with pattern reversal comprises:
providing a 3D structure upon the substrate;
depositing at least one layer of material upon the 3D structure;
establishing a pattern upon the layer of material, the pattern providing a plurality of exposed areas and a plurality of covered areas;
treating the exposed areas of the layer of material to provide a plurality of etch resistant areas of material, the covered areas remaining etch susceptible;
removing the pattern;
etching the layer of material to remove the etch susceptible areas of material;
depositing at least one additional material layer upon the remaining etch resistant material and 3D structure; and
processing the additional material layer in accordance with the desired characteristics of the thin film devices.
6. The method of claim 5 , wherein treating the exposed areas provides a plurality of toughened areas, the covered areas remaining un-toughened.
7. The method of claim 5 , wherein the etch resistant properties of the treatment are removed following the etching of the etch susceptible areas and before the depositing of the additional material layer.
8. The method of claim 5 , wherein the pattern is established by treating, comprising:
depositing a planarization material and removing a portion of the planarization material, thereby exposing a portion of the layer of material, wherein the treating reverses the pattern upon the layer of material.
9. The method of claim 5 , wherein the remaining etch resistant material is conductive and depositing at least one additional material layer upon the remaining etch resistant material further comprises:
depositing a dielectric layer;
depositing a semiconductor layer upon the dielectric layer; and
depositing a top metal layer upon the semiconductor layer.