Semiconductor device and method for the fabrication thereof grinding frame portion such that plural electrode constituent portions
View Patent ↗Disclosed is a semiconductor device which comprises a semiconductor element having a plurality of electrodes, a plurality of external electrodes disposed around the periphery of the semiconductor element, a fine wire electrically connected between at least one of surfaces of each of the plural external electrodes and at least one of the plural electrodes of the semiconductor element, and an encapsulating resin which encapsulates the semiconductor element, the plural external electrodes, and the fine wires and whose external shape is a rectangular parallelepiped, wherein a bottom surface of the semiconductor element and a bottom surface of each of the plural external electrode are exposed from a bottom surface of the encapsulating resin and a top surface of the semiconductor element and a top surface of each of the plural external electrode are located substantially coplanar with each other.
1. A method for the fabrication of a semiconductor device comprising the steps of:
(a) preparing a frame member;
said frame member including:
a plate-like frame major portion having a top surface and a bottom surface;
a plurality of electrode constituent portions which are projections formed on said top surface of said frame major portion, each of said plural electrode constituent portions having at its top surface a projecting stepped portion and a projected portion; and
an element housing portion located in a top surface area of said frame major portion surrounded by said plural electrode constituent portions, said element housing portion housing therein a semiconductor element to be fixed thereto;
(b) fixing to said element housing portion of said frame member said semiconductor element having a plurality of electrodes;
(c) after said step (b), electrically connecting by a fine wire between at least one of said plural electrodes of said semiconductor element and a top surface of at least one of said projecting stepped portions of said plural electrode constituent portions;
(d) encapsulating, by a resin, a surface of said frame member on the side where said semiconductor element has been fixed to said element housing portion and has been electrically connected by said fine wire;
(e) after said step (d), grinding said frame major portion of said frame member such that said plural electrode constituent portions are separated from each other to become individual external electrodes, and exposing both a bottom surface of each of said plural external electrodes and a bottom surface of said semiconductor element from said resin; and
(f) after said step (d), grinding a top surface of said resin on the side where said semiconductor element has been fixed to said element housing portion and has been electrically connected by said fine wire such that top surfaces of said projected portions are exposed from said resin top surface.