Metal/ceramic bonding member and method for producing same
In a method for producing a metal/ceramic bonding member wherein an electroless nickel alloy plating layer 18 is formed on a predetermined portion of the surface of an aluminum plate 12 which is bonded to at least one side of a ceramic substrate 10 and which is formed so as to have a predetermined circuit pattern, an alkali peeling type resist 16 having a predetermined shape is applied on the surface of the aluminum plate 12 before forming the electroless nickel alloy plating layer 18 , and then, a portion of the surface of the aluminum plate 12 , on which the resist 16 is not applied, is activated with an acidic zinc immersion solution containing a fluoride or silicofluoride. Then, after the electroless nickel alloy plating layer 18 is formed, the resist 16 is removed with an alkali.
1 . A method for producing a metal/ceramic bonding member, said method comprising the steps of:
bonding a metal member to a ceramic member;
applying an alkali peeling type resist having a predetermined shape on a surface of the metal member bonded to said ceramic member;
activating a portion of the surface of the metal member, on which the resist is not applied, with an acidic zinc immersion solution containing a fluoride or silicofluoride for depositing zinc thereon; and
carrying out an electroless nickel alloy plating on the activated portion of the surface of the metal member, and thereafter, removing the resist with an alkali.
2 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , wherein said metal member is made of aluminum or an aluminum alloy.
3 . A method for producing a metal/ceramic bonding member as set forth in claim 2 , wherein said aluminum alloy is selected from the group consisting of aluminum-silicon alloys, aluminum-magnesium alloys, aluminum-silicon-boron alloys and aluminum-magnesium-silicon alloys.
4 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , wherein said activating step is sequentially carried out twice.
5 . A method for producing a metal/ceramic bonding member as set forth in claim 4 , wherein an aqueous acidic solution of an acid selected from the group consisting of nitric acid, hydrochloric acid, sulfuric acid and acetic acid is used as a zinc deposition film removing solution at said activating step for removing a zinc deposition film with the zinc deposition film removing solution.
6 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , wherein said ceramic member mainly contains a component selected from alumina, aluminum nitride, silicon carbide and silicon nitride.
7 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , wherein said metal member is bonded to said ceramic member by a molten metal bonding method, an impregnation bonding method, a brazing bonding method or a direct bonding method.
8 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , wherein said electroless nickel alloy plating is selected from the group consisting of a nickel-phosphorus alloy plating, a nickel-boron alloy plating, and a composite plating of a nickel-phosphorus alloy plating and nickel-boron alloy plating.
9 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , wherein said ceramic member is a ceramic substrate, and said metal member is a metal circuit plate having a predetermined circuit pattern.
10 . A method for producing a metal/ceramic bonding member as set forth in claim 1 , which further comprises a step of carrying out at least one of a degreasing process or a chemical polishing process before said activating step.
11 . A metal/ceramic bonding member produced by a method for producing a metal/ceramic bonding member as set forth in claim 1.