Fabrication of MEMS devices with spin-on glass
View Patent ↗A method of making an etched structure in the fabrication of a MEMS device involves depositing a bulk layer, typically of polysilicon, prone to surface roughness. At least one layer of photo-insensitive spin-on planarizing material, such as silicate-based spin-on glass, is formed on the bulk layer to reduce surface roughness. This is patterned with a photoresist layer. A deep etch is then performed through the photoresist layer into the bulk layer. This technique results in much more precise etch structures.
1. A microstructure component for a MEMS device, comprising:
a polysilicon bulk layer having a thickness greater than 0.5 μm and less than 100 μm, said bulk layer being deposited on an underlying sacrificial layer, and said bulk layer having an upper surface with a surface roughness created by a series of randomly shaped pyramids of random height causing local variations in the thickness of the bulk layer;
at least one layer of photo-insensitive spin-on planarizing material deposited directly on said upper surface so as to be in contact therewith and smooth out said surface roughness created by said pyramids;
a photoresist layer deposited directly on said planarizing material so as to be in contact therewith; and
a deep etch trench extending through said photoresist layer to said underlying sacrificial layer.
2. A microstructure as claimed in claim 1 , wherein said planarizing material is spin-on glass.
3. A microstructure as claimed in claim 2 , wherein said spin-on glass is inorganic spin-on glass.
4. A microstructure as claimed in claim 3 , wherein said spin-on glass is a phosphorus-doped silicate-based spin-on glass.
5. A microstructure as claimed in claim 2 , wherein said spin-on glass is selected from the group consisting of: methyl-based, ethyl-based or other semi-organic spin-on glass.
6. A microstructure as claimed in claim 1 , wherein said planarizing material is selected from the group consisting of: silsesquioxane, polyimide, a spin-on antireflective layer; or an organic or semi-organic material optically resistant to exposure of said photoresist layer.
7. A microstructure as claimed in claim 1 , comprising multiple layers of said planarizing material.
8. A microstructure as claimed in claim 1 , wherein the thickness of the photoresist layer lies in the range 1.0 μm to 500 μm.
9. A microstructure as claimed in claim 7 , wherein the thickness of said polysilicon layer is about 11 μm.
10. A microstructure as claimed in claim 1 , wherein a bottom surface of said bulk layer is flat and straight.