Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
View Patent ↗Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
1. A plasma apparatus, comprising:
a vessel formed of dielectric material and defining a channel for containing a gas;
a heat sink adjacent to the vessel;
a thermal interface disposed between and in mechanical communication with the vessel and the heat sink; and
an ultraviolet blocking layer disposed between the vessel and the thermal interface,
wherein the thermal interface defines a space between the heat sink and the vessel that accommodates a movement of at least one of the thermal interface, the heat sink, and the vessel in response to thermally induced dimensional changes.
2. The apparatus of claim 1 , wherein the channel has a toroidal shape.
3. The apparatus of claim 1 , wherein the heat sink comprises at least two segments that substantially surround the vessel and are joined together by at least one spring-loaded mechanism.
4. The apparatus of claim 3 , wherein the vessel has a toroidal shape and the heat sink comprises at least four segments that are joined by at least two spring-loaded mechanisms to urge the at least four segments toward the vessel and to accommodate thermal mismatch between the vessel and the heat sink.
5. The apparatus of claim 3 , wherein the heat sink and the at least one spring-loaded mechanism define a self-supporting cooling shell.
6. The apparatus of claim 1 , wherein the thermal interface comprises at least one of a composite material, a fibrous material, and a laminate material.
7. The apparatus of claim 1 , wherein the thermal interface comprises a plurality of cantilevered fingers.
8. The apparatus of claim 7 , wherein the plurality of cantilevered fingers comprise at least one of copper and beryllium.
9. The apparatus of claim 1 , wherein the vessel consists of the dielectric material.
10. The apparatus of claim 1 , wherein the thermal interface comprises a plurality of coils.
11. The apparatus of claim 1 , wherein the thermal interface comprises a conformal material.
12. The apparatus of claim 11 , wherein the conformal material covers 25% to 100% of an outer surface area of the vessel.
13. The apparatus of claim 1 , wherein the space is filled with a gas for heat transfer from the vessel to the heat sink, and the space has a thickness of less than 100 micrometers.
14. The apparatus of claim 1 , wherein the thickness of the space is less than 25 micrometers.
15. The apparatus of claim 1 , wherein the thickness of the space is less than 12 micrometers.
16. The apparatus of claim 1 , wherein the thermal interface comprises a conformal layer and a spring layer, and the conformal layer has a first side in contact with one of the heat sink and the vessel and a second side in contact with the spring layer.
17. The apparatus of claim 1 , further comprising a gas inlet showerhead disposed adjacent to an inlet of the vessel and defining apertures that direct most of an inlet gas flow along an inner surface of the vessel.
18. The apparatus of claim 1 , wherein the ultraviolet blocking layer is a thin sheet of material.
19. The apparatus of claim 1 , wherein the ultraviolet blocking layer is a coating applied to the vessel.
20. The apparatus of claim 1 , wherein the ultraviolet blocking layer is formed from a metal.
21. The apparatus of claim 1 , where the ultraviolet blocking layer blocks ultraviolet radiation generated in a plasma in the vessel from entering the space between the heat sink and the vessel.
22. The apparatus of claim 1 , where the ultraviolet blocking layer aids cooling of the vessel.
23. A plasma apparatus, comprising:
a dielectric vessel comprising a conductive portion and defining a channel for containing a gas;
a heat sink adjacent to the vessel;
a thermal interface disposed between and in mechanical communication with the vessel and the heat sink; and
an ultraviolet blocking layer disposed between the vessel and the thermal interface,
wherein the thermal interface defines a space between the heat sink and the vessel that accommodates a movement of at least one of the thermal interface, the heat sink, and the vessel in response to thermally induced dimensional changes.
24. A plasma apparatus, comprising:
a vessel consisting of a dielectric material and defining a channel for containing a gas;
a heat sink adjacent to the vessel;
a thermal interface disposed between and in mechanical communication with the vessel and the heat sink; and
an ultraviolet blocking layer disposed between the vessel and the thermal interface,
wherein the thermal interface defines a space between the heat sink and the vessel that accommodates a movement of at least one of the thermal interface, the heat sink, and the vessel in response to thermally induced dimensional changes.
25. A plasma apparatus, comprising:
a vessel comprising a dielectric material and defining a channel for containing a gas;
a heat sink adjacent to the vessel;
a thermal interface disposed between and in mechanical communication with the vessel and the heat sink; and
an light blocking layer disposed between the vessel and the thermal interface,
wherein the thermal interface defines a space between the heat sink and the vessel, that accommodates a movement of at least one of the thermal interface, the heat sink, and the vessel in response to thermally induced dimensional changes.