FET gate structure and fabrication process
The invention includes a method of fabricating a gate structure for a field effect transistor and the gate structure. The method includes providing a crystalline silicon substrate and epitaxially growing a gate insulating layer of crystalline rare earth insulating material on the crystalline silicon substrate. A gate stack of crystalline silicon is then epitaxially grown on the layer of crystalline rare earth insulating material and doped to provide a desired type of conductivity. The gate insulating layer and the gate stack are etched and a metal electrical contact is deposited on the epitaxially grown gate stack of crystalline silicon to define a gate structure.
1. A gate structure for semiconductor components comprising:
a crystalline semiconductor substrate, the substrate having an orientation of one of (111), (001), (110), and miscut between 1-6 degrees;
a gate insulating layer of epitaxially grown crystalline rare earth insulator material on the crystalline semiconductor substrate, the gate insulating layer having a thickness in a range of a few angstroms to 100 angstroms;
a gate stack of crystalline semiconductor material on the layer of epitaxially grown crystalline rare earth insulator material, the gate stack of crystalline semiconductor material being doped to provide a desired type of conductivity; and
a metal electrical contact on the gate stack.
2. A gate structure for semiconductor components as claimed in claim 1 wherein the crystalline semiconductor substrate includes a crystalline silicon substrate.
3. A gate structure for semiconductor components as claimed in claim 2 wherein the crystalline semiconductor substrate includes a crystalline silicon substrate with silicon-on-insulator construction.
4. A gate structure for semiconductor components as claimed in claim 1 wherein the gate insulating layer of crystalline rare earth insulating material includes one of erbium and ytterbium.
5. A gate structure for semiconductor components as claimed in claim 1 wherein the gate stack of crystalline semiconductor material includes crystalline silicon.
6. A gate structure for semiconductor components as claimed in claim 5 wherein the gate stack of crystalline semiconductor material is doped with boron.
7. A gate structure for semiconductor components as claimed in claim 1 wherein the gate structure is included in a field effect transistor.
8. A gate structure for semiconductor components as claimed in claim 7 wherein the field effect transistor further includes a source area and a drain area in the substrate on opposite sides of the gate structure.
9. A gate structure for semiconductor components as claimed in claim 1 wherein the epitaxially grown crystalline rare earth insulator material includes one of rare earth oxide, rare earth nitride, and rare earth oxynitride.