Semiconductor device and method for fabricating the device
View Patent ↗There are provided a semiconductor device and method for fabricating the device capable of achieving reliable electrical connection by securely directly bonding conductors to each other even though bonding surfaces are polished by a CMP method and solid-state-bonded to each other. By polishing according to the CMP method, a through hole conductor 5 and a grounding wiring layer 10, which are made of copper, become concave in a dish-like shape and lowered in level, causing a dishing portion 17 since they have a hardness lower than that of a through hole insulator 11 made of silicon nitride. The through hole insulator 11 is selectively etched by a reactive ion etching method until the through hole insulator 11 comes to have a height equal to the height of a bottom portion 19 of the dishing portion 17 of the through hole conductor 5. The through hole conductors 5 and 25 are aligned with each other, and the bonding surfaces 12 and 22 are bonded to each other in a solid state bonding manner.
1. A semiconductor device fabricating method comprising the steps of:
forming a first portion having a first substrate, a conductive layer and an insulating layer laminated on the first substrate and a bonding surface that is chemically mechanically polished and exposes a conductive region and an insulating region;
forming a second portion having a second substrate, a conductive layer and an insulating layer laminated on the second substrate and a bonding surface that is chemically mechanically polished and exposes at least a conductive region;
selectively etching the insulating region of at least one of the bonding surface of the first portion and the bonding surface of the second portion, thereby lowering the surface of the insulating region with respect to the surface of the conductive region; and
applying pressure welding loads to the first portion and the second portion for achievement of solid state bonding of the bonding surface of the first portion to the bonding surface of the second portion and for achievement of electrical connection of the conductive region of the first portion with the conductive region of the second portion.
2. A semiconductor device fabricating method as claimed in claim 1 , wherein the surface of the insulating region is lowered by reactive ion etching.
3. A semiconductor device fabricating method as claimed in claim 1 , wherein etching is performed so that a height of a bottom of a dishing portion of the conductive region and a height of the insulating region become approximately equal to each other.
4. A semiconductor device fabricating method as claimed in claim 1 , wherein the conductive region of the first portion and the conductive region of the second portion are solid-state-bonded to each other, and the insulating region of the first portion and the insulating region of the second portion face each other with interposition of a clearance.
5. A semiconductor device fabricating method as claimed in claim 4 , wherein the insulating region that surrounds the conductive region of the first portion and the insulating region that surrounds the conductive region of the second portion face each other with interposition of a clearance.
6. A semiconductor device fabricating method as claimed in claim 1 , wherein the conductive region of the first portion and the conductive region of the second portion are solid-state-bonded to each other, and the insulating region of the first portion and the insulating region of the second portion are put in contact with or solid-state-bonded to each other.
7. A semiconductor device fabricating method as claimed in claim 6 , wherein the insulating region that surrounds the conductive region of the first portion and the insulating region that surrounds the conductive region of the second portion are put in contact with or solid-state-bonded to each other.
8. A semiconductor device fabricating method as claimed in claim 5 , wherein the conductive regions are end surfaces of through hole conductors and the insulating regions are end surfaces of through hole insulators that surround the respective through hole conductors.
9. A semiconductor device fabricating method as claimed in claim 7 , wherein the conductive regions are end surfaces of through hole conductors and the insulating regions are end surfaces of through hole insulators that surround the respective through hole conductors.
10. A semiconductor device fabricating method as claimed in claim 1 , wherein the first substrate or the second substrate is any one of a semiconductor substrate, an inorganic substrate and an organic substrate.
11. A method of making a semiconductor device, the method comprising:
providing a first portion comprising a first substrate, a conductive layer and an insulating layer laminated on the first substrate and a bonding surface that is chemically mechanically polished and exposes a conductive region and an insulating region, wherein the conductive region includes a concave surface defining a dishing portion;
providing a second portion comprising a second substrate, a conductive layer and an insulating layer laminated on the second substrate and a bonding surface that is chemically mechanically polished and exposes at least a conductive region having a concave surface defining a dishing portion;
bonding the bonding surface of the first portion and the bonding surface of the second portion to each other so that the dishing portions of the conductive regions of the respective first and second portions are bonded to each other so as to directly contact one another, and
wherein at least one of the bonding surface of the first portion and the bonding surface of the second portion has the insulating region lowered with respect to the conductive region.
12. The method of claim 11 , wherein the conductive region of the first portion and the conductive region of the second portion are solid-state-bonded to each other, and the insulating region of the first portion and the insulating region of the second portion face each other with interposition of a clearance.
13. The method of claim 12 , wherein the insulating region that surrounds the conductive region of the first portion and the insulating region that surrounds the conductive region of the second portion face each other with interposition of a clearance.
14. The method of claim 11 , wherein the conductive region of the first portion and the conductive region of the second portion are solid-state-bonded to each other, and the insulating region of the first portion and the insulating region of the second portion are put in contact with or solid-state-bonded to each other.
15. The method of claim 14 , wherein the insulating region that surrounds the conductive region of the first portion and the insulating region that surrounds the conductive region of the second portion are put in contact with or solid-state-bonded to each other.
16. The method of claim 13 , wherein the conductive regions are end surfaces of through hole conductors and the insulating regions are end surfaces of through hole insulators that surround the respective through hole conductors.
17. The method of claim 15 , wherein the conductive regions are end surfaces of through hole conductors and the insulating regions are end surfaces of through hole insulators that surround the respective through hole conductors.
18. The method of claim 11 , wherein the first substrate or the second substrate is any one of a semiconductor substrate, an inorganic substrate and an organic substrate.