Conducting metal oxide with additive as p-MOS device electrode
View Patent ↗Methods for fabricating high work function p-MOS device metal electrodes are provided. In one embodiment, a method is provided for producing a metal electrode including the steps of: providing a high k dielectric stack with an exposed surface; contacting the exposed surface of the high k dielectric stack with a vapor of a metal oxide wherein the metal oxide is selected from the group consisting of RuO x , IrO x , ReO x , MoO x , WO x , VO x , and PdO x ; and contacting the exposed surface of the dielectric stack with a vapor of an additive selected from the group consisting of SiO 2 , Al 2 O 3 , HfO 2 , ZrO 2 , MgO, SrO, BaO, Y 2 O 3 , La 2 O 3 , and TiO 2 , whereby contacting the exposed surface of the dielectric stack with the vapor of the metal oxide and the vapor of the additive forms an electrode and wherein the additive is present at an amount between about 1% to about 50% by atomic weight percent in the electrode.
1. A method for forming a metal electrode comprising:
providing a high k dielectric stack with an exposed surface;
contacting the exposed surface of the high k dielectric stack with a vapor of a metal oxide wherein the metal oxide comprises a material selected from the group consisting of RuO x , IrO y , ReO z , MoO a , WO b , VO x , and PdO c ; where each of x, y, z, a, b, and c are real numbers; and
contacting the exposed surface of the dielectric stack with a vapor of an additive selected from the group consisting of SiO 2 , Al 2 O 3 , HfO 2 , ZrO 2 , MgO, SrO, BaO, Y 2 O 3 , La 2 O 3 , and TiO 2 , whereby contacting the exposed surface of the dielectric stack with the vapor of the metal oxide and the vapor of the additive forms an electrode and wherein the additive is present at an amount between about 1% to about 50% by atomic percent in the electrode.
2. The method of claim 1 wherein contacting the exposed surface of the dielectric stack with a vapor of a metal oxide contacting the exposed surface of the dielectric stack with a vapor of an additive further comprises a physical vapor deposition selected from the group consisting of ebeam, sputtering, and pulsed laser deposition.
3. The method of claim 1 wherein contacting the exposed surface of the dielectric stack with a vapor of a metal oxide and contacting the exposed surface of the dielectric stack with a vapor of an additive further comprises forming an electrode having an additive present at an amount of between about 5% to about 20% by atomic percent.
4. The method according to claim 1 wherein contacting the exposed surface of the dielectric stack with a vapor of a metal oxide and contacting the exposed surface of the dielectric stack with a vapor of an additive further comprises forming an electrode that remains substantially stable at temperatures up to approximately 1000° C.
5. The method according to claim 1 further comprising forming the electrode in a CMOS device.
6. The method according to claim 1 further comprising forming the electrode as a p-MOS device electrode metal structure.
7. The method according to claim 1 further comprising forming the electrode with a surface work function greater than approximately 5 eV.
8. The electrode according to claim 1 wherein the electrode comprises a uniform mixture of host conducting metal oxide and additive made by PVD and MOCVD methods.
9. The method according to claim 1 further comprising forming the electrode as a gate electrode.
10. A method of tuning the work function of an electrode comprising:
providing a high k dielectric stack with an exposed surface;
contacting the exposed surface of the high k dielectric stack with a vapor of a metal oxide wherein the metal oxide is selected from the group consisting of RuO x , IrO x , ReO x , MoO x , WO x , VO x , and PdO x ;
contacting the exposed surface of the dielectric stack with a vapor of an additive selected from the group consisting of SiO 2 , Al 2 O 3 , HfO 2 , ZrO 2 , MgO, SrO, BaO, Y 2 O 3 , La 2 O 3 , and TiO 2 ;
maintaining contact between the exposed surface of the high k dielectric stack and the vapor of metal oxide and the vapor of additive so as to form an electrode wherein the additive is present at an amount between about 1% to about 50% by atomic percent in the electrode; and
controlling the amount of additive present in the electrode so as to produce a desired work function.
11. The method according to claim 10 wherein controlling the amount of additive present further comprises controlling the amount of additive present in the electrode so as to produce a work function of at least 5 eV.
12. The method according to claim 10 further comprising providing a high k dielectric stack with a set k value and a producing an electrode with a desired work function so that the combined dielectric stack and electrode have a electrical work function of between about 5.0 eV and about 5.4 eV.