Transitional dielectric layer to improve reliability and performance of high dielectric constant transistors
View Patent ↗A gate dielectric structure ( 201 ) fabrication process includes forming a transitional dielectric film ( 205 ) overlying a silicon oxide film ( 204 ). A high dielectric constant film ( 206 ) is then formed overlying an upper surface of the transitional dielectric film ( 205 ). The composition of the transitional dielectric film ( 205 ) at the silicon oxide film ( 204 ) interface primarily comprises silicon and oxygen. The high K dielectric ( 206 ) and the composition of the transitional dielectric film ( 205 ) near the upper surface primarily comprise a metal element and oxygen. Forming the transitional dielectric film ( 205 ) may include forming a plurality of transitional dielectric layers ( 207 ) where the composition of each successive transitional dielectric layer ( 207 ) has a higher concentration of the metal element and a lower concentration of silicon. Forming the transitional dielectric layer ( 205 ) may include performing multiple cycles of an atomic layer deposition process ( 500 ) where a precursor concentration for each cycle differs from the precursor concentration of the preceding cycle.
1. A semiconductor fabrication process for forming a gate dielectric structure overlying a semiconductor substrate, comprising:
forming a transitional dielectric film overlying the semiconductor substrate, wherein a composition of the transitional dielectric film proximal to the semiconductor substrate differs from a composition of an upper surface of the transitional dielectric film, wherein the composition of the transitional dielectric film proximately to the substrate primarily comprises silicon and oxygen or silicon, oxygen, and nitrogen and wherein the composition of the transitional dielectric film proximal to the upper surface primarily comprises a metal element and oxygen or a metal element, oxygen, and nitrogen; and
forming a high dielectric constant film overlying an upper surface of the transitional dielectric film, wherein the high dielectric constant film comprises a metal element and oxygen and wherein forming the transitional dielectric film comprises forming a plurality of transitional dielectric layers, wherein the composition of each transitional dielectric layer includes a higher concentration of the metal element and a lower concentration of silicon than an underlying transitional dielectric layer.
2. The method of claim 1 , wherein forming the plurality of transitional dielectric layers comprises forming a plurality of monolayers using atomic layer deposition.
3. The method of claim 2 , wherein a composition of each successive monolayer differs from a composition of the preceding monolayer.
4. The method of claim 3 , wherein the metal element is selected from the group consisting of hafnium, aluminum, tantalum, zirconium, and yttrium.
5. The method of claim 1 , wherein forming the transitional dielectric layer comprises performing multiple cycles of an atomic layer deposition process wherein a precursor concentration for each cycle differs from the precursor of a preceding cycle.
6. The method of claim 5 , wherein the precursor contains a metal element and a semiconductor element and wherein the relative concentration of metal to semiconductor element is increased for successive cycles of the atomic layer deposition process.
7. The method of claim 6 , wherein the precursor includes nitrogen and further wherein the relative concentration varies within the transitional dielectric layer.
8. A method of fabricating a dielectric for use as a transistor gate dielectric in a semiconductor fabrication process, comprising:
forming a transitional dielectric film overlying a residual oxide film overlying a semiconductor substrate, wherein the transitional dielectric film includes a plurality of transitional dielectric layers, wherein a dielectric constant of a layer proximal to an upper portion of the transitional dielectric film is greater than a dielectric constant of a transitional dielectric layer proximal to an interface with residual oxide film, wherein the composition of the transitional dielectric film proximately to the substrate primarily comprises silicon and oxygen or silicon, oxygen, and nitrogen and wherein the composition of the transitional dielectric film proximal to the upper surface primarily comprises a metal element and oxygen or a metal element, oxygen, and nitrogen; and
forming a high K dielectric overlying the transitional dielectric film, wherein a dielectric constant of the high K dielectric is greater than 3.9, wherein the high dielectric constant film comprises a metal element and oxygen and wherein forming the transitional dielectric film comprises forming a plurality of transitional dielectric layers, wherein the composition of each transitional dielectric layer includes a higher concentration of the metal element and a lower concentration of silicon than an underlying transitional dielectric layer.
9. The method of claim 8 , wherein a dielectric constant of the high K dielectric is greater than approximately 20.
10. The method of claim 8 , wherein the metal element is selected from the group consisting of hafnium, aluminum, tantalum, zirconium, and yttrium.
11. The method of claim 10 , wherein the transitional dielectric layers are monoatomic layers formed using an atomic layer deposition process.
12. The method of claim 11 , wherein the metal to silicon concentration increases in each successive layer.