Non-critical complementary masking method for poly-1 definition in flash memory device fabrication
View Patent ↗A method is disclosed for the definition of the poly-1 layer in a semiconductor wafer. A non-critical mask is used to recess field oxides in the periphery prior to poly-1 deposition by an amount equal to the final poly-1 thickness. A complimentary non-critical mask is used to permit CMP of the core to expose the tops of core oxide mesas from the shallow isolation trenches.
1. A method of defining a poly-1 layer of a semiconductor chip, said semiconductor chip comprising a core memory area and a peripheral region, comprising:
depositing a thick nitride barrier level above a substrate of said semiconductor chip;
etching shallow isolation trenches into said nitride layer and said substrate;
filling said shallow isolation trenches with oxide material;
removing excess of said oxide material from on top of remainder of said nitride layer;
depositing a first non-critical mask on said core memory area, leaving said peripheral region exposed;
recessing said oxide material in said exposed peripheral region by an amount approximately equal to a final polysilicon thickness;
stripping said first non-critical mask;
stripping a remainder of said nitride barrier layer, thereby leaving mesas of oxide material in said core memory area;
depositing a layer of polysilicon, called the poly-1 layer, over said core memory area and said peripheral region;
depositing a thin hard mask over said core memory area and said peripheral region;
depositing a second non-critical complimentary mask over said peripheral region;
etching away an exposed portion of said thin hard mask over said core memory area;
polishing an exposed core memory area to remove said polysilicon from on top of said mesas of field oxide in said core memory area;
stripping said complimentary mask;
stripping a remaining portion of said thin hard mask.
2. The method of claim 1 , wherein said thick nitride layer deposited to a depth of 1000-1700 angstroms.
3. The method of claim 1 , wherein said thick nitride layer is deposited on top of a thin layer of oxide material.
4. The method of claim 1 , wherein said polishing to remove said excess field oxide from on top of remainder of said nitride layer is accomplished by chemical mechanical polishing (CMP).
5. The method of claim 1 , wherein said recessing of said field oxide is accomplished by a wet etch.
6. The method of claim 1 , wherein said recessing of said field oxide is accomplished by a dry etch.
7. The method of claim 1 , wherein said mesas of field oxide remaining in said core memory area after said nitride stripping have heights of 500-1000 angstroms.
8. The method of claim 1 , wherein said complimentary mask comprises an oxide hardmask.
9. The method of claim 1 , wherein said polishing of said exposed core memory area to remove said polysilicon from on top of mesas of field oxide in said core memory area comprises chemical mechanical planarization.
10. The method of claim 1 further comprising:
depositing a layer of photoresist on said thick nitride barrier layer;
lithographically patterning at least one shallow isolation trench onto said nitride barrier layer.