Phase change memory cell with high read margin at low power operation
View Patent ↗A memory cell device includes a first electrode, a heater adjacent the first electrode, phase-change material adjacent the heater, a second electrode adjacent the phase-change material, and isolation material adjacent the phase-change material for thermally isolating the phase-change material.
1. A memory cell device comprising:
a first electrode;
a heater adjacent the first electrode;
phase-change material adjacent the heater;
a second electrode adjacent the phase-change material; and
isolation material adjacent the phase-change material for thermally isolating the phase-change material,
wherein the isolation material comprises a dielectric material comprising a porous oxide film having a thermal conductivity between 0.1 and 0.8 W/mk.
2. The memory cell device of claim 1 , further comprising:
a diffusion barrier adjacent the heater and the isolation material to prevent diffusion of heater material into the isolation material.
3. The memory cell device of claim 2 , wherein the diffusion barrier comprises SiN.
4. The memory cell device of claim 1 , wherein the phase-change material comprises a chalcogenide.
5. The memory cell device of claim 1 , wherein the dielectric material limits heat leakage from the phase-change material.
6. A memory cell device comprising:
a first electrode;
a heater adjacent the first electrode;
phase-change material adjacent the heater;
a second electrode adjacent the phase-change material; and
means adjacent the phase-change material for thermally isolating the phase-change material, and comprising a dielectric material with a porous oxide film having a thermal conductivity between 0.1 and 0.8 W/mk.
7. The memory cell device of claim 6 , further comprising:
a diffusion barrier adjacent the heater to prevent diffusion of heater material into the dielectric material.
8. The memory cell device of claim 7 , wherein the diffusion barrier comprises SiN.
9. The memory cell device of claim 6 , wherein the phase-change material comprises a chalcogenide.
10. The memory cell device of claim 6 , wherein the dielectric material limits heat leakage from the phase-change material.
11. The memory cell device of claim 10 , wherein the dielectric material comprises a porous oxide film having a thermal conductivity between 0.1 and 0.8 W/mk.
12. A memory cell comprising:
a first electrode;
a heater contacting the first electrode;
phase-change material contacting the heater;
a second electrode contacting the phase-change material;
isolation material contacting the phase-change material for thermally isolating the phase-change material; and
a diffusion barrier contacting the heater and the isolation material to prevent diffusion of heater material into the isolation material.
13. The memory cell of claim 12 , wherein the diffusion barrier comprises SiN.
14. The memory cell of claim 12 , wherein the phase-change material comprises a chalcogenide.
15. A memory cell comprising:
a first electrode;
a heater contacting the first electrode;
phase-change material contacting the heater;
a second electrode contacting the phase-change material; and
isolation material contacting the phase-change material for thermally isolating the phase-change material,
wherein the isolation material comprises a dielectric material that limits heat leakage from the phase-change material.
16. The memory cell of claim 15 , wherein the dielectric material comprises a porous oxide film having a thermal conductivity between 0.1 and 0.6 W/mk.