Method for manufacturing a contact for a semiconductor component and related structure
View Patent ↗A semiconductor component and a method for manufacturing the semiconductor component that are suitable for use with low temperature processing. A semiconductor substrate is provided and an optional layer of silicon nitride is formed on the semiconductor substrate using Atomic Layer Deposition (ALD). A layer of dielectric material is formed on the silicon nitride layer using Sub-Atmospheric Chemical Vapor Deposition (SACVD) at a temperature below about 450° C. When the optional layer of silicon nitride is not present, the SACVD dielectric material is formed on the semiconductor substrate. A contact hole having sidewalls is formed through the SACVD dielectric layer, through the silicon nitride layer, and exposes a portion of the semiconductor substrate. A layer of tungsten nitride is formed on the exposed portion of the semiconductor substrate and along the sidewalls of the contact hole. Tungsten is formed on the layer of tungsten nitride.
1. A method for manufacturing a semiconductor component, comprising:
providing a semiconductor material;
forming a layer of silicon nitride directly on the semiconductor material;
forming a layer of dielectric material directly on the layer of silicon nitride using Sub-Atmospheric Chemical Vapor Deposition (SACVD), the layer of dielectric material comprising doped silicate glass;
forming a contact hole in the layer of dielectric material, the contact hole having sidewalls and exposing a portion of the semiconductor material; and
forming a layer of tungsten nitride in the contact hole and on the exposed portion;
wherein all processing temperatures for manufacturing the semiconductor component are less than about 450 degrees Celsius;
wherein forming the layer of dielectric material includes using ozone as a carrier gas.
2. The method of claim 1 , wherein the layer of silicon nitride is formed using atomic layer deposition (ALD).
3. The method of claim 2 , further including forming the contact hole through the layer of silicon nitride.
4. The method of claim 3 , further including forming a layer of tungsten on the layer of tungsten nitride.
5. The method of claim 4 , further including cleaning the contact hole before forming the layer of tungsten nitride.
6. The method of claim 1 , further including forming a layer of tungsten on the layer of tungsten nitride.
7. The method of claim 1 , further including cleaning the contact hole before forming the layer of tungsten nitride.
8. The method of claim 1 , further including forming a layer of silicide from a portion of the semiconductor material and wherein forming the contact hole exposes the layer of silicide.
9. The method of claim 8 , wherein forming the layer of silicide includes using a silicide selected from the group of silicides consisting of nickel silicide, tungsten silicide, titanium silicide, cobalt silicide, and tantalum silicide.