Semiconductor device having high dielectric constant layers of different thicknesses
View Patent ↗A semiconductor device 100 includes a silicon substrate 102 , an N-type MOSFET 118 including a first high dielectric constant film 111 and a polycrystalline silicon film 114 on the silicon substrate 102, and a P-type MOSFET 120 including a second high dielectric constant film 12 and a polycrystalline silicon film 114 juxtaposed to N-type MOSFET 118 on the silicon substrate 102. The second high dielectric constant film 112 is formed to have the film thickness thinner than the film thickness of the first high dielectric constant film 111. The first high dielectric constant film 111 and the second high dielectric constant film 112 contains one or more element(s) selected from Hf and Zr.
1. A semiconductor device, comprising:
a semiconductor substrate;
an N-type metal oxide semiconductor field effect transistor (MOSFET) including:
a first gate insulating film, formed on said semiconductor substrate, and composed of a first high dielectric constant film containing one or more element(s) selected from a group consisting of Hf and Zr; and
a first gate electrode composed of a polycrystalline silicon film, said polycrystalline silicon film being disposed on said first gate insulating film to contact with said first high dielectric constant film; and
a P-type MOSFET including:
a second gate insulating film, formed on said semiconductor substrate to be juxtaposed to said N-type MOSFET, and composed of a second high dielectric constant film containing one or more element(s) selected from a group consisting of Hf and Zr; and
a second gate electrode composed of a polycrystalline silicon film, said polycrystalline silicon film being disposed on said second gate insulating film to contact with said second high dielectric constant film,
wherein a film thickness of said second high dielectric constant film is less than a film thickness of said first high dielectric constant film, wherein said first high dielectric constant film and said second high dielectric constant film include Hf and Si, and a content ratio of Hf for total content of Hf and Si is equal to or higher than 20% in said first high dielectric constant film and said second high dielectric constant film.