Method of fabricating a semiconductor device used in a stacked-type semiconductor device
View Patent ↗A method of fabricating a semiconductor device includes the steps of providing a heat-resistant sheet on an interposer so as to cover electrode terminals provided on the interposer, and sealing a semiconductor chip on the interposer sandwiched between molds with a sealing material. The electrode terminals are covered by the heat-resistant resin for protection, and the semiconductor chip is then sealed with resin. It is thus possible to avoid the problem in which contaminations adhere to the electrode terminals. This makes it possible to prevent the occurrence of resin burrs on the interposer and contamination of the electrode pads and to improve the production yield.
1. A method comprising:
placing a semiconductor device on a lower mold, wherein the semiconductor device includes a semiconductor chip mounted on a first surface of an interposer having electrical pads surrounding the area of the semiconductor chip;
placing a heat-resistant sheet on the interposer so as to cover the electrical pads, wherein said heat-resistant sheet is made of a material that is little deformed or changed in size during a given thermal treatment;
clamping an upper mold to the lower mold, wherein the heat-resistant sheet is positioned on the interposer and the upper mold directly contacts the top of the heat-resistant sheet, and wherein the upper mold includes a cavity in which the semiconductor chip is accommodated and a gate;
injecting sealing material through the gate into the cavity of the upper mold, wherein the heat-resistant sheet is arranged so as not to overlap with the sealing material except for a portion of the heat-resistant sheet disposed between the gate of the upper mold and the interposer which prevents scaling material from adherine to the electrical pads;
applying the given thermal treatment to seal the semiconductor chip on the interposer by the sealing material;
removing the upper and lower molds from the semiconductor device including the semiconductor chip sealed to the interposer by the sealing material; and
removing the heat-resistant sheet from the interposer of the semiconductor device including the semiconductor chip sealed to the interposer by the sealing material.
2. The method as claimed in claim 1 , wherein placing the heat-resistant sheet includes attaching the heat-resistant sheet to the interposer by an adhesive.
3. The method as claimed in claim 1 , wherein the heat-resistant sheet comprises layers laminated and has flexibility on a side of the heat-resistant sheet brought into contact with the interposer.
4. The method as claimed in claim 1 , wherein the heat-resistant sheet has an opening for arranging the heat-resistant sheet on the interposer so as not to overlap with the semiconductor chip sealed with the sealing material.
5. The method as claimed in claim 1 , further comprising providing ball terminals on a backside of the interposer opposite to a side thereof on which the heat-resistant sheet is placed.
6. The method as claimed in claim 1 , wherein the interposer and the heat-resistant sheet have guide holes that can engage a guide pin of at least one of the molds, the method further comprising placing the interposer and the heat-resistant sheet in the molds in position by inserting the guide pin into the guide holes.
7. The method as claimed in claim 1 , wherein one of the molds has a first cross section in the gate through which the sealing material is injected into the cavity, and a second cross section at an interface between the gate and the cavity in which the semiconductor chip is accommodated, the second cross section being smaller than the first cross section.
8. The method as claimed in claim 1 , wherein the electrode are provided on a whole surface of the interposer except an area in which the semiconductor chip is located.
9. The method as claimed in claim 1 , further comprising stacking another semiconductor on said semiconductor chip sealed with the sealing material.
10. The method as claimed in claim 1 , wherein the sealing material is resin.