Semiconductor device having adhesion increasing film to prevent peeling
View Patent ↗A semiconductor device includes at least one semiconductor constructing body provided on one side of a base member, and having a semiconductor substrate and a plurality of external connecting electrodes provided on the semiconductor substrate. An insulating layer is provided on the one side of the base member around the semiconductor constructing body. An adhesion increasing film is formed between the insulating layer, and at least one of the semiconductor constructing body and the base member around the semiconductor constructing body, for preventing peeling between the insulating layer and the at least one of the semiconductor constructing body and base member.
1. A semiconductor device comprising:
a base member;
at least one semiconductor constructing body which is provided on one side of the base member, and which comprises a semiconductor substrate, a plurality of external connecting electrodes provided on the semiconductor substrate, and a sealing film covering circumferential surfaces of the external connecting electrodes;
a peripheral insulating layer provided on said one side of the base member around the at least one semiconductor constructing body;
an upper insulating layer which covers the sealing film of the at least one semiconductor constructing body and the peripheral insulating layer; and
an adhesion increasing film which is formed: (i) between the peripheral insulating layer and sides of the at least one semiconductor constructing body, (ii) between the peripheral insulating layer and the base member around the at least one semiconductor constructing body, and (iii) between the sealing film of the at least one semiconducting body and the upper insulating layer, to prevent peeling between the peripheral insulating layer and the sides of the at least one semiconductor constructing body, between the peripheral insulating layer and the base member around the at least one semiconductor constructing body, and between the sealing film of the at least one semiconductor constructing body and the upper insulating layer.
2. A device according to claim 1 , wherein the adhesion increasing film and an adhesive layer are laminated between the base member and the at least one semiconductor constructing body.
3. A device according to claim 2 , wherein the at least one semiconductor constructing body is provided on the base member via a lamination of the adhesion increasing film, the adhesive layer, and another adhesion increasing film.
4. A device according to claim 1 , further comprising at least one upper interconnecting layer formed above the at least one semiconductor constructing body and the peripheral insulating layer, wherein the at least one upper interconnecting layer is electrically connected to the external connecting electrodes of the at least one semiconductor constructing body, and includes a connecting pad portion.
5. A device according to claim 4 , wherein the external connecting electrodes of the at least one semiconductor constructing body include a plurality of columnar electrodes, and wherein the sealing film of the at least one semiconductor constructing body covers circumferential surfaces of the columnar electrodes.
6. A device according to claim 4 , wherein the at least one upper interconnecting layer is provided on the upper insulating layer.
7. A device according to claim 6 , further comprising another adhesion increasing film provided between the at least one semiconductor constructing body and the upper insulating layer.
8. A device according to claim 4 , further comprising an uppermost insulating film which covers a portion except for a connecting pad portion of an uppermost interconnecting layer of the at least one upper interconnecting layer.
9. A device according to claim 8 , further comprising a solder ball electrically connected to the connecting pad portion of the uppermost interconnecting layer.
10. A semiconductor device comprising:
a base member;
at least one semiconductor constructing body which is provided on one side of the base member, and which comprises a semiconductor substrate and a plurality of external connecting electrodes provided on the semiconductor substrate;
an insulating layer provided on said one side of the base member around the semiconductor constructing body; and
an adhesion increasing film which is formed between: (i) the insulating layer, and (ii) at least one of the semiconductor constructing body and the base member around the semiconductor constructing body, to prevent peeling between the insulating layer and said at least one of the semiconductor constructing body and the base member;
wherein the adhesion increasing film is made of a silane coupling agent.
11. A device according to claim 10 , wherein the silane coupling agent is made of a material having (C n H 2n+1 O) m —Si—(wherein n, m=1, 2, 3) in a molecule.