IP Library › Granted Patent US 7,517,558
Granted Patent B2
US 7,517,558 · App. 11/146,248 · Granted Apr 14, 2009

Methods for positioning carbon nanotubes

Assignee: Micron Technology, Inc.
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Quick Facts
Patent No.
US 7,517,558
App. No.
11/146,248
Granted
Apr 14, 2009
Kind
B2
Abstract

The present invention is generally directed to a system for controlling placement of nanoparticles, and methods of using same. In one illustrative embodiment, the device includes a substrate and a plurality of funnels in the substrate, wherein each of the funnels comprises an inlet opening and an elongated, rectangular shaped outlet opening. In one illustrative embodiment, the method includes creating a dusty plasma comprising a plurality of carbon nanotubes, positioning a mask between the dusty plasma and a desired target for the carbon nanotubes, the mask having a plurality of openings extending therethrough, and extinguishing the dusty plasma to thereby allow at least some of the carbon nanotubes in the dusty plasma to pass through at least some of the plurality of openings in the mask and land on the target.

Claims (16)

1. A method of positioning carbon nanotubes, comprising:

creating a dusty plasma comprising a plurality of carbon nanotubes;

positioning a mask between said dusty plasma and a desired target for said carbon nanotubes, said mask having a plurality of openings extending therethrough;

extinguishing said dusty plasma;

the carbon nanotubes falling out of the extinguished plasma and toward said mask, the mask patterning the falling carbon nanotubes to form a pattern of the carbon nanotubes on said target;

wherein said plurality of openings correspond to a plurality of funnels;

wherein each of said funnels comprises an inlet and an outlet, with the outlet being narrower than the inlet along at least one cross-section; and

using parallel spaced-apart conductive plates to count nanotubes exiting the outlets of the funnels.

2. The method of claim 1 , wherein each of said funnels has a conical cross-sectional configuration.

3. A method of patterning carbon nanotubes, comprising:

creating a dusty plasma comprising a plurality of carbon nanotubes;

positioning a mask between said dusty plasma and a target for said carbon nanotubes, said mask having a plurality of openings extending therethrough, some of the openings being substantially funnel shaped and others of the openings being substantially hourglass shaped;

extinguishing said dusty plasma;

the carbon nanotubes falling out of the extinguished plasma and toward said mask;

the falling carbon nanotubes passing through the openings in the mask, and being patterned by said passage through the openings to form a pattern on the target; and

using parallel spaced-apart conductive plates to count nanotubes exiting the openings.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 6, 2005
From: SUBRAMANIAN, KRUPAKAR MURALI; RUEGER, NEAL; SANDHU, GURTEJ
To: MICRON TECHNOLOGY, INC.
Reel/Frame 016667/0596 →
Continuity (1)
Related Publication 20060275549A1 · Dec 7, 2006