Area diode formation in SOI application
View Patent ↗A method for making a semiconductor device is provided herein. In accordance with the method, a semiconductor stack is provided which includes a semiconductor substrate, a first semiconductor layer, and a first dielectric layer disposed between the substrate and the first semiconductor layer. A first trench is formed in the first dielectric layer which exposes a portion of the substrate, and a first implant region is formed in the first trench. Cathode and anode regions are formed in the first implant region.
1. A method for making a semiconductor device, comprising:
providing a semiconductor stack comprising a semiconductor substrate, a first semiconductor layer, and a first dielectric layer disposed between the substrate and the first semiconductor layer;
forming a first trench in the first dielectric layer which exposes a portion of the substrate; forming a second semiconductor layer, at least a portion of which is disposed in the first trench;
forming a first implant region in the second semiconductor layer;
forming an interlayer dielectric (ILD) over the first implant region;
forming cathode and anode regions in the second semiconductor layer;
forming second and third trenches which extend through the ILD and expose at least a portion of the cathode and anode regions, respectively; and
forming electrical contacts in the second and third trenches.
2. The method of claim 1 , wherein the second semiconductor layer is formed by epitaxially growing a layer of semiconductor material on the portion of the substrate exposed within the first trench.
3. The method of claim 1 , wherein the second semiconductor layer is doped.
4. The method of claim 1 ,
wherein a second dielectric layer is disposed over the first dielectric layer, and wherein the first trench extends through both the first and second dielectric layers.
5. The method of claim 4 , wherein the first dielectric layer is a buried oxide (BOX) layer, and wherein the second dielectric layer is a field oxide (FOX) layer.
6. The method of claim 1 , further comprising the step of forming a second implant region in the first semiconductor layer.
7. The method of claim 1 wherein the cathode and anode regions are formed by depositing a layer of spacer material over the first implant region, etching the layer of spacer material such that first and second regions of the first implant region are exposed, and implanting cathode and anode regions in the first and second regions of the first implant region, respectively.
8. The method of claim 7 , wherein the layer of spacer material is etched such that a spacer structure is formed between the cathode and anode regions.
9. The method of claim 7 , wherein the layer of spacer material is etched such that the spacer material covers substantially the entire surface of the first implant region exclusive of the cathode and anode regions.
10. A method for making a semiconductor device, comprising:
providing a substrate having a first semiconductor layer disposed thereon and having a first dielectric layer disposed between the substrate and the first semiconductor layer;
exposing a portion of the first dielectric layer;
forming a second dielectric layer over the exposed portion of the first dielectric layer;
creating a trench through the first and second dielectric layers which exposes a first portion of the substrate;
forming a second semiconductor layer over the first portion of the substrate; and
forming cathode and anode regions in the second semiconductor layer.
11. The method of claim 10 , further comprising doping the second semiconductor layer so as to define an N-well or a P-well therein.
12. A method for making a semiconductor device, comprising:
providing a semiconductor stack comprising a semiconductor substrate, a first semiconductor layer, and a first dielectric layer disposed between the substrate and the first semiconductor layer;
forming a first trench in the first dielectric layer which exposes a portion of the substrate;
forming a second semiconductor layer, at least a portion of which is disposed in the first trench; and
forming cathode and anode regions in the second semiconductor layer;
wherein the cathode and anode regions are formed by depositing a layer of spacer material over a first implant region, etching the layer of spacer material such that first and second regions of the first implant region are exposed, and implanting cathode and anode regions in the first and second regions of the first implant region, respectively.
13. The method of claim 12 , wherein the layer of spacer material is etched such that a spacer structure is formed between the cathode and anode regions.
14. The method of claim 12 , wherein the layer of spacer material is etched such that the spacer material covers substantially the entire surface of the first implant region exclusive of the cathode and anode regions.
15. A method for making a semiconductor device, comprising:
providing a semiconductor stack comprising a semiconductor substrate, a first semiconductor layer, a first dielectric layer disposed between the substrate and the first semiconductor layer, and a second dielectric layer disposed over the first dielectric layer;
forming a first trench which exposes a portion of the substrate and which extends through both the first and second dielectric layers;
forming a second semiconductor layer, at least a portion of which is disposed in the first trench; and
forming cathode and anode regions in the second semiconductor layer;
wherein the semiconductor device is a diode.
16. The method of claim 15 , wherein the second semiconductor layer is formed by epitaxially growing a layer of semiconductor material on the portion of the substrate exposed within the first trench.
17. The method of claim 15 , further comprising:
forming first and second implant regions in the second semiconductor layer;
forming an interlayer dielectric (ILD) over the first and second implant regions;
forming second and third trenches which extend through the ILD and expose at least a portion of the cathode and anode regions, respectively; and
forming electrical contacts in the second and third trenches.
18. The method of claim 15 , wherein the cathode and anode regions are formed by depositing a layer of spacer material over a first implant region, etching the layer of spacer material such that first and second regions of the first implant region are exposed, and implanting cathode and anode regions in the first and second regions of the first implant region, respectively.
19. The method of claim 18 , wherein the layer of spacer material is etched such that a spacer structure is formed between the cathode and anode regions.