Method for manufacturing one-time electrically programmable read only memory
View Patent ↗A method for manufacturing an OTEPROM is described. A tunneling oxide layer, a first conductive layer, a first patterned mask layer are formed on a substrate. A trench is formed in the substrate. An insulating layer is formed to fill the trench. A portion of the first conductive layer destined to form the floating gate is exposed and then a cap layer is formed thereon. The first patterned mask layer is removed and then a second conductive layer and a second patterned mask layer are formed over the substrate. A word line and a floating gate are formed using the second patterned mask layer and the cap layer as a mask. The second patterned mask layer is removed and then source/drain regions are formed in the substrate on both sides of the word line and the floating gate and between the word line and the floating gate.
1. A method for manufacturing a one-time electrically programmable read only memory, comprising the steps of:
providing a substrate;
forming a tunneling dielectric layer over the substrate;
forming a first conductive layer over the tunneling dielectric layer;
forming a first patterned mask layer over the first conductive layer;
removing a portion of the first conductive layer, the tunneling dielectric layer and the substrate using the first patterned mask layer as a mask and forming a device isolation structure therein;
removing a portion of the first patterned mask layer to expose a portion of the first conductive layer destined to form a floating gate;
forming a cap layer over the exposed first conductive layer;
removing the first patterned mask layer;
forming a second conductive layer over the substrate;
forming a second patterned mask layer over the second conductive layer;
removing a portion of the second conductive layer and the first conductive layer using the second patterned mask layer and the cap layer as a mask to form a word line and a floating gate;
removing the second patterned mask layer; and
forming doped regions in the substrate on both the outer sides of the word line and the floating gate and also between the word line and the floating gate.
2. The method of claim 1 , wherein the step of forming the tunneling dielectric layer includes performing a thermal oxidation process.
3. The method of claim 1 , wherein the step of forming the cap layer includes performing a thermal oxidation process.
4. The method of claim 1 , wherein after removing the second patterned mask layer, further comprises a step of forming lightly doped regions in the substrate on both outer sides of the word line and the floating gate and also between the word line and the floating gate.
5. The method of claim 4 , wherein after forming the lightly doped regions, further comprises a step of forming spacers on the sidewalls of both the word line and the floating gate.
6. The method of claim 5 , wherein the step for forming the spacers comprises:
forming an insulating material layer over the substrate; and
performing an anisotropic etching process to remove a portion of the insulating material layer.
7. The method of claim 4 , wherein before forming the lightly doped regions, further comprises a step of forming insulation layers on the sidewalls of both the word line and the floating gate.
8. The method of claim 7 , wherein the step for forming the insulation layers includes performing a thermal oxidation process.
9. The method of claim 7 , wherein the doped regions are p-type doped regions.
10. A method for manufacturing a one-time electrically programmable read only memory, comprising the steps of:
providing a substrate having a device isolation structure for defining an active region, wherein a tunneling dielectric layer, a first conductive layer and a first mask layer are formed in sequence thereon and the device isolation structure cuts the first conductive layer up to produce a linear strip;
patterning the first mask layer to expose a portion of the first conductive layer destined to formed a floating gate;
forming a cap layer over the exposed first conductive layer;
removing the first mask layer;
forming a second conductive layer over the substrate;
forming a second patterned mask layer over the second conductive layer;
removing a portion of the second conductive layer and the first conductive layer using the second patterned mask layer and the cap layer as a mask to form a word line and a floating gate;
removing the second patterned mask layer;
forming insulation layers on the sidewalls of the word line and the floating gate; and
forming doped regions in the substrate on both outer sides of the word line and the floating gate and also between the word line and the floating gate.
11. The method of claim 10 , wherein the step of forming the tunneling dielectric layer includes performing a thermal oxidation process.
12. The method of claim 10 , wherein the step of forming the cap layer includes performing a thermal oxidation process.
13. The method of claim 12 , wherein after forming the insulation layers, further comprises a step of forming lightly doped regions in the substrate on both outer sides of the word line and the floating gate and also between the word line and the floating gate.
14. The method of claim 13 , wherein after forming the lightly doped regions, further comprises a step of forming spacers on the sidewalls of both the word line and the floating gate.
15. The method of claim 14 , wherein the step for forming the spacers comprises:
forming an insulating material layer over the substrate; and
performing an anisotropic etching process to remove a portion of the insulating material layer.
16. The method of claim 10 , wherein the step for forming the insulation layers includes performing a thermal oxidation process.
17. The method of claim 10 , wherein the doped regions are p-type doped regions.