Method for fabricating semiconductor device
View Patent ↗A method for fabricating a semiconductor device is described. The method includes providing a substrate having a trench therein, and a trench device in the trench. The trench device includes two gate structures disposed on the sidewalls of the trench, a doped region in the substrate between the gate structures and an inter-gate dielectric layer disposed on the surface of the gate structures. A thermal treatment process in a nitrogen-containing ambient is performed to remove the native oxide layer formed on the surface of the doped region. Then, a conductive layer is formed to fill in the trench.
1. A method for fabricating a semiconductor device, comprising:
forming a trench in a substrate;
performing a first thermal treatment process in a nitrogen-contaming ambient to remove a first native oxide layer comprising silicon dioxide formed on the surface of the trench;
forming a buffer layer in the trench;
performing a second thermal treatment process in a nitrogen-containing ambient to remove a second native oxide layer formed on the surface of the buffer layer, wherein a heating temperature of the first thermal treatment process and the second thermal treatment process is in a range of 700-1000° C.; and
forming the conductive layer to fully fill the trench.
2. The method for fabricating the semiconductor device according to claim 1 , wherein the first and the second thermal treatment processes are rapid thermal anneal process.
3. The method for fabricating the semiconductor device according to claim 1 , wherein a heating time of the first thermal treatment process and the second thermal treatment process is in a range of about 30 -90 seconds.
4. The method for fabricating the semiconductor device according to claim 1 , wherein a material of the conductive layer comprises doped polysilicon.
5. The method for fabricating the semiconductor device according to claim 1 , wherein the step of forming the conductive layer comprises performing chemical vapor deposition (CVD).
6. The method for fabricating the semiconductor device according to claim 1 , wherein a material constituting the buffer layer comprises undoped polysilicon.