Wafer measuring fixture
View Patent ↗A wafer-measuring fixture suitable for carrying a broken wafer is described. The wafer-measuring fixture comprises a base having a carrying component. The carrying component is used to hold the broken wafer. Furthermore, a plurality of scale marks is set around the carrying component to mark the broken positions on the wafer.
1. A wafer-measuring fixture suitable for carrying a broken wafer, comprising:
a base having a carrying component, wherein the carrying component supports the broken wafer and has a plurality of scale marks disposed around to locate the position of any cracks on the broken wafer.
2. The wafer-measuring fixture of claim 1 , wherein the wafer-measuring fixture further comprises a cover hinged to one side of the base.
3. The wafer-measuring fixture of claim 2 , wherein the wafer-measuring fixture further comprises a loose-leaf connection component hinged between the cover and the base.
4. The wafer-measuring fixture of claim 1 , wherein one side of the base comprises at least a groove.
5. The wafer-measuring fixture of claim 1 , wherein the material constituting the base comprises an acrylic compound.
6. The wafer-measuring fixture of claim 1 , wherein the carrying component is at least equal in size to the broken wafer.