Method of making a metal gate semiconductor device
View Patent ↗A patterned polysilicon gate is over a metal layer that is over a gate dielectric layer, which in turn is over a semiconductor substrate. A thin layer of material is conformally deposited over the polysilicon gate and the exposed metal layer and then etched back to form a sidewall spacer on the polysilicon gate and to re-expose the previously exposed portion of the metal layer. The re-exposed metal layer is etched using an etchant that is selective to the gate dielectric material and the sidewall spacer. Even though this etch is substantially anisotropic, it has an isotropic component that would etch the sidewall of the polysilicon gate but for the protection provided by the sidewall spacer. After the re-exposed metal has been removed, a transistor is formed in which the metal layer sets the work function of the gate of the transistor.
1. A method of forming a semiconductor device, comprising:
providing a semiconductor substrate;
forming a first high-k dielectric layer over the semiconductor substrate;
forming a metal-containing layer over the first high-k dielectric layer;
forming a polysilicon layer over the metal-containing layer;
patterning the polysilicon layer to form a polysilicon gate structure;
depositing a layer of material over the polysilicon gate structure;
etching the layer of material to form a sidewall spacer on the polysilicon gate structure and to result in an exposed portion of the metal-containing layer;
etching the exposed portion of the metal-containing layer to form a metal gate structure; and
forming a first doped region in the substrate on a first side of the metal gate structure and a second doped region in the substrate on a second side of the metal gate structure.
2. The method of claim 1 , wherein the first high-k dielectric material comprises a metal oxide.
3. The method of claim 1 , wherein the first high-k dielectric material comprises one of the group consisting of hafnium, zirconium, and silicon.
4. The method of claim 1 , wherein the first high-k dielectric material is deposited at a thickness of 10-40 Å.
5. The method of claim 1 , wherein the metal-containing layer comprises one of a group consisting of a PMOS metal and an NMOS metal.
6. The method of claim 1 , wherein the etching the exposed portion of the metal-containing layer comprising using an etchant that is selective between the metal-containing layer and the sidewall spacer.
7. The method of claim 1 , wherein the metal containing layer is deposited to a thickness of 50-100 Å.
8. The method of claim 1 , wherein the layer of material is the same composition as that of the first high-k dielectric layer.
9. The method of claim 1 , wherein the layer of material is deposited by atomic layer deposition (ALD).
10. The method of claim 1 , wherein the layer of material is deposited to a thickness of 10-40 Å.
11. The method of claim 1 , wherein the depositing the layer of material comprises conformally depositing the layer of material.
12. The method of claim 1 , wherein the etching the exposed metal-containing layer is performed by reactive ion etching.
13. The method of claim 12 , further comprising etching at least a portion of the metal-containing layer under the sidewall spacer.
14. A method of forming a semiconductor device, comprising:
providing a semiconductor substrate;
forming a first high-k dielectric layer over the semiconductor substrate;
forming a metal-containing layer over the first high-k dielectric layer;
forming a polysilicon layer over the metal-containing layer;
patterning the polysilicon layer to form a polysilicon gate structure;
depositing a layer of material over the polysilicon gate structrure;
etching the layer of material to form a sidewall spacer on the polysilicon gate structure;
etching the exposed metal-containing layer to form a metal gate structure;
applying an etchant to a portion of the first high-k dielectric layer using the polysilicon gate structure as a mask; and
forming doped regions in the substrate adjacent to the metal gate structure.
15. The method of claim 14 , wherein the etching the exposed metal-containing layer comprises applying an etchant that is selective between the metal-containing layer and the sidewall spacer by reactive ion etching.
16. The method of claim 14 , wherein the metal-containing layer comprises one of a group consisting of a PMOS metal and an NMOS metal.
17. The method of claim 14 , wherein the depositing the layer of material is by atomic layer deposition (ALD).
18. A method of forming a semiconductor device, the method comprising:
providing a semiconductor substrate;
providing a first high-k dielectric layer over the semiconductor substrate;
providing a metal layer over the first high-k dielectric layer, wherein the metal layer comprises a first layer of a first composition and a second layer of a second composition different from the first composition;
providing a polysilicon gate over the metal layer;
forming a sidewall spacer on sidewalls of the polysilicon gate;
applying an etchant to the sidewall spacer and the metal layer that is selective between the sidewall spacer and the metal layer to form a metal gate under the polysilicon gate; and
forming doped regions in the substrate adjacent to the metal gate.
19. The method of claim 18 , wherein the first material comprises one of a group consisting of oxides, carbides, borides and nitrides of a metal element.
20. The method of claim 18 , wherein the forming the sidewall spacer comprises depositing a layer of material by atomic layer deposition and anisotropically etching the layer of material.