Method for fabricating cell transistor of flash memory
View Patent ↗A method for fabricating a cell transistor of a flash memory including a device isolation film is disclosed, to prevent the mouse bite and the residue of a gate electrode, which includes the steps of forming a moat pattern of STI structure on a semiconductor substrate; forming a shallow trench by etching the semiconductor substrate exposed by the moat pattern; forming a gap-fill insulating layer in the shallow trench by HDP; forming the device isolation film of STI structure in the shallow trench by etching the gap-fill insulating layer with CMP; forming a flash cell pattern for opening an area for flash memory cell transistor in the semiconductor substrate; and removing the flash cell pattern and the moat pattern after etching the upper surface of the device isolation film in the area being opened by the flash cell pattern.
1. A method for fabricating a, transistor comprising:
forming a moat pattern on a scmiconductor substrate;
forming a shallow trench by etching the semiconductor substrate exposed by the moat pattern, using the moat pattern as a mask;
forming a gap-fill insulating layer in the shallow trench and on the moat pattern by HDP;
forming a device isolation film in the shallow trench by polishing the gap-fill insulating layer;
forming a cell pattern for masking a periphery circuit portion of the semiconductor substrate, opening a transitor area of the semiconductor substrate, and exposing the device isolation film in the transistor area;
etching an upper surface of the device isolation film in the transistor area; and
removing the cell pattern and the moat pattern after etching the upper surface of the device isolation film.
2. The method of claim 1 , wherein etching the upper surface of the device isolation film comprises wet-etching using an HF solution.
3. The method of claim 1 , wherein the upper surface of the device isolation layer is etched at a thickness of 200 Å to 300 Å.
4. The method of claim 1 , wherein the moat pattern comprises a silicon nitride layer.
5. The method of claim 1 , further comprising forming a silicon oxide layer below the moat pattern.
6. The method of claim 1 , wherein the gap-fill insulating layer comprises silicon oxide or a tetraethylorthosilicate (TEOS) based insulating layer.
7. The method of claim 1 , wherein the cell pattern comprises a photoresist and opens the transistor area.
8. The method of claim 7 , wherein the cell pattern is removed by ashing.
9. The method of claim 1 , wherein the moat pattern is removed with phosphoric acid.
10. The method of claim 1 , further comprising sequentially forming a tunnel oxide layer, a first conductive layer, a gate insulating layer, and a second conductive layer on the semiconductor substrate after removing the cell pattern and the moat pattern.
11. The method of claim 10 , further comprising forming a gate electrode for a flash memory transistor by etching the second conductive layer, the gate insulating layer, the first conductive layer, and the tunnel oxide layer.
12. The method of claim 10 , wherein the first and second conductive layers comprise doped polysilicon and the device isolation film comprises a shallow trench isolation (STI) structure.
13. The method of claim 10 , wherein the gate insulating layer comprises a oxide-nitride-oxide (ONO) layer.
14. The method of claim 11 , further comprising forming a source region and a drain region at opposite sides of the gate electrode.
15. The method of claim 14 , further comprising forming an insulating layer on the entire surface of the substrate after forming the source region and the drain region.
16. The method of claim 15 , further comprising forming a contact hole through the insulating layer to the source region or drain region, forming a contact electrode filling the contact hole, and forming a line on the insulating layer connecting to the contact electrode.
17. The method of claim 14 , further comprising forming a metal silicide layer on the gate electrode, the source region, and the drain region.
18. The method of claim 14 , further comprising forming spacers at the sidewalls of the gate electrode.
19. The method of claim 17 , wherein the metal silicide layer comprises tungsten silicide.
20. The method of claim 1 , further comprising forming a well in the semiconductor substrate.