Semiconductor device manufacturing method
View Patent ↗Disclosed are a semiconductor device and a method for manufacturing the same. The semiconductor device includes a semiconductor substrate, in which active and inactive regions are separated by a field oxidation film; source/drain junctions contacting the field oxidation film and formed in the active regions of the semiconductor substrates; a buffer oxidation film formed at designated portions of the source/drain junctions, and a gate electrode formed on the semiconductor substrate adjacent to the buffer oxidation film; and a silicide film formed at designated portions of the source/drain junctions and the upper surface of the gate electrode.
1. A method for manufacturing a semiconductor device comprising:
forming a field oxidation film on inactive regions of a silicon substrate;
forming buffer oxidation films on active regions of the semiconductor substrate, wherein the buffer oxidation films expose the semiconductor substrate where a gate electrode is to be formed;
forming an insulating film on the exposed semiconductor substrate and the buffer oxidation films;
depositing a gate conductive film on the insulating film;
patterning the gate conductive film and the insulating film to form a gate electrode and a gate insulating film, wherein both ends of the gate insulating film and the gate electrode overlap the end of the buffer oxidation films;
forming a spacer insulating film for preventing a silicide film from being formed at the sidewalls of the gate electrode;
forming source/drain junctions on the silicon substrate adjacent to, but not directly under, the gate electrode; and
forming a silicide film at designated portions of the source/drain junctions and on the upper surface of the gate electrode.
2. The method as set forth in claim 1 , wherein the buffer oxidation film is selectively formed only in the source/drain junctions using a nitride film as a mask.
3. The method as set forth in claim 1 , wherein the buffer oxidation film is used, when impurities are injected into the silicon substrate to form the source/drain junctions, without using an additional oxidation film for protecting the silicon substrate.
4. The method as set forth in claim 1 , wherein designated portions of the buffer oxidation film are removed when the blank oxidation film is etched after impurities are injected into the silicon substrate to form the source/drain junctions.
5. The method as set forth in claim 1 , comprising forming a blank oxidation film on regions of the structure other than regions in which the silicide film is formed prior to the step of forming the silicide film.
6. The method as set forth in claim 1 , wherein the silicide film is made of Ti silicide.
7. The method as set forth in claim 2 , comprising implanting impurities into the source/drain junctions of the semiconductor substrate to form buffer oxidation film impurity junctions prior to forming the buffer oxidation film using the nitride film as a mask.