Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture
View Patent ↗Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
1. An electrostatic MEMS switch, comprising:
a monolithic cantilevered beam formed on a first substrate;
an electrostatic plate disposed adjacent to the monolithic cantilevered beam;
at least one electrical contact formed on a second substrate; and
a hermetic seal which couples the first substrate to the second substrate, and seals the MEMS switch, wherein an electrostatic force is generated between the monolithic cantilevered beam and the electrostatic plate; and
at least one electrical via formed through a thickness of the second substrate, and wherein the hermetic seal provides an electrical connection between the at least one electrical via and the monolithic cantilevered beam.
2. The electrostatic MEMS switch of claim 1 , wherein the first substrate is a silicon-on-insulator substrate including a device layer, a handle wafer and an insulating oxide layer between the device layer and the handle wafer, and the second substrate is at least one of a silicon substrate and a silicon-on-insulator substrate.
3. The electrostatic MEMS switch of claim 1 , wherein the at least one monolithic cantilevered beam comprises a portion of a silicon device layer of a silicon-on-insulator substrate.
4. The electrostatic MEMS switch of claim 3 , wherein the electrostatic plate and the electrical contacts comprise a multilayer film including:
1) an adhesion layer of chromium;
2) a barrier layer of molybdenum; and
3) a metallization layer of gold.
5. The electrostatic MEMS switch of claim 3 , wherein the hermetic seal comprises:
an alloy of gold and indium which bonds the first substrate to the second substrate.
6. The electrostatic MEMS switch of claim 2 , wherein the monolithic cantilevered beam is formed from the device layer of the silicon-on-insulator substrate, and affixed to the handle wafer of the silicon-on-insulator substrate by the insulating oxide layer.
7. The electrostatic MEMS switch of claim 1 , further comprising a shunt bar coupled to the monolithic cantilevered beam, which electrically connects two electrical contacts formed on the second substrate when the electrostatic MEMS switch is closed, wherein the shunt bar is electrically isolated from other portions of the monolithic cantilevered beam.
8. A method of operating the electrostatic MEMS switch of claim 7 , comprising:
applying a first voltage to the monolithic cantilevered beam formed on the first substrate;
applying a second voltage to an electrostatic plate formed on the second substrate;
forming an electrical connection between the two electrical contacts by bending the monolithic cantilevered beam and shunt bar toward the electrical contacts in response to the applied voltages.
9. The method of claim 8 , further comprising:
applying an input signal to one of the contacts formed on the second substrate; and
obtaining an output signal from the other electrical contact formed on the second substrate.
10. The method of claim 8 , further comprising:
removing the first voltage applied to the monolithic cantilevered beam; and
removing the second voltage applied to the electrostatic plate to open the electrostatic MEMS switch.
11. An apparatus for manufacturing an electrostatic MEMS switch, comprising:
means for forming a monolithic cantilevered beam on a first substrate;
means for forming an electrostatic plate adjacent to the monolithic cantilevered beam;
means for forming at least one electrical contact on a second substrate;
means for coupling the first substrate to the second substrate with a hermetic seal that seals the MEMS switch, wherein an electrostatic force is generated between the monolithic cantilevered beam and the electrostatic plate; and
means for forming at least one electrical via through a thickness of the second substrate, and wherein the hermetic seal provides an electrical connection between the at least one electrical via and the monolithic cantilevered beam.
12. A method for manufacturing an electrostatic MEMS switch, comprising:
forming a monolithic cantilevered beam on a first substrate;
forming an electrostatic plate adjacent to the monolithic cantilevered beam;
forming at least one electrical contact on a second substrate;
coupling the first substrate to the second substrate with a hermetic seal that seals the MEMS switch, wherein an electrostatic force is generated between the monolithic cantilevered beam and the electrostatic plate; and
forming at least one electrical via through a thickness of the second substrate, wherein the hermetic seal provides an electrical connection between the at least one electrical via and the monolithic cantilevered beam.
13. The method of claim 12 , wherein the hermetic seal comprises an alloy of gold and indium.
14. The method of claim 13 , wherein forming the electrostatic plate and the at least one electrical contact further comprises:
depositing an adhesion layer over the second substrate;
depositing a barrier layer over the adhesion layer; and
depositing a metallization layer over the barrier layer.
15. The method of claim 12 , further comprising:
forming electrical vias through a thickness of the second substrate.
16. The method of claim 15 , wherein forming the electrical vias comprises:
forming at least one blind hole on a front side of the second substrate;
forming a seed layer in the at least one blind hole;
depositing a conductive material onto the seed layer; and
removing material from a rear side of the second substrate to remove a dead-end wall of the at least one blind hole.
17. The method of claim 16 , wherein depositing a conductive material onto the seed layer comprises plating copper onto the seed layer.
18. The method of claim 12 , wherein coupling the first substrate to the second substrate with a hermetic seal comprises:
depositing a first metal on the first substrate; and
depositing a second metal on the second substrate; and
coupling the first substrate to the second substrate by heating the first substrate and the second substrate to at least a melting point of at least one of the first metal and the second metal.
19. The method of claim 12 , wherein the first substrate comprises a silicon-on-insulator substrate, and the second substrate comprises at least one of a silicon wafer and a silicon-on-insulator substrate.
20. The method of claim 19 , wherein forming the monolithic cantilevered beam on the first substrate comprises:
etching an outline of the monolithic cantilevered beam in a device layer of the silicon-on-insulator substrate;
releasing the monolithic cantilevered beam from a handle wafer of the silicon-on-insulator substrate by etching an oxide layer between the device layer and the handle wafer.