Bottom conductor for integrated MRAM
View Patent ↗A structure that is well suited to connecting an MTJ device to a CMOS integrated circuit is described. It is built out of three layers. The bottom layer serves as a seed layer for the center layer, which is alpha tantalum, while the third, topmost, layer is selected for its smoothness, its compatibility with the inter-layer dielectric materials, and its ability to protect the underlying tantalum. A method for its formation is also described.
1. A bottom conducting lead, comprising:
an integrated circuit having a top surface that includes an exposed via;
on said top surface, including said exposed via, a seed layer suitable for promoting growth of alpha phase tantalum;
a layer of alpha tantalum on said seed layer;
on said tantalum layer, a capping layer having a surface roughness that is less than about 2.5 Angstroms, said seed, alpha tantalum, and capping layers having a common width and constituting said bottom conducting lead.
2. The bottom conducting lead described in claim 1 wherein said common width is between about 0.8 and 1 micron.
3. The bottom conducting lead described in claim 1 , further comprising;
an antiferromagnetic layer on said bottom electrode;
on said antiferromagnetic layer, a magnetically pinned layer whose surface roughness derives from that of said bottom electrode;
a dielectric tunneling layer on said pinned layer, and
a magnetically free layer on said dielectric tunneling layer, said antiferromagnetic, pinned, dielectric, and free layers together constituting a magnetic tunnel junction.
4. The bottom conducting lead described in claim 1 wherein said seed layer that is suitable for promoting growth of alpha phase tantalum has a thickness between about 10 and 20 Angstroms.
5. The bottom conducting lead described in claim 1 wherein said seed layer that is suitable for promoting growth of alpha phase tantalum is selected from the group consisting of TaN, TiW, TiOr, and WN.
6. The bottom conducting lead described in claim 1 wherein said layer of alpha tantalum has a thickness of between about 40 and 200 Angstroms.
7. The bottom conducting lead described in claim 1 wherein said capping layer has a thickness of between about 10 and 50 Angstroms.
8. The bottom conducting lead described in claim 1 wherein said capping layer is TaN.