Patent Application
Utility
Small
App. No. 11/224,767
· Confirmation No. 3737
Multi-single wafer processing apparatus
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-02-18 | ABN |
Abandonment | 2 | View | |
| 2008-07-24 | CTFR |
Final Rejection | 11 | View | |
| 2008-07-24 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2008-04-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-04-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2008-04-22 | SPEC |
Specification | 1 | View | |
| 2008-04-22 | CLM |
Claims | 3 | View | |
| 2008-04-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2008-04-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2008-01-24 | CTNF |
Non-Final Rejection | 11 | View | |
| 2008-01-24 | 1449 |
List of References cited by applicant and considered by examiner | 6 | View | |
| 2008-01-24 | 892 |
List of references cited by examiner | 1 | View | |
| 2008-01-24 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2008-01-24 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2008-01-18 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2007-11-12 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2007-11-12 | CLM |
Claims | 4 | View | |
| 2007-11-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2007-11-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-11-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2007-10-10 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2007-08-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2007-08-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-05-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2007-05-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2006-03-06 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 4 | View | |
| 2006-03-06 | XT/ |
Extension of Time | 1 | View | |
| 2006-03-06 | OATH |
Oath or Declaration filed | 3 | View | |
| 2006-03-06 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-10-03 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2005-09-12 | TRNA |
Transmittal of New Application | 2 | View | |
| 2005-09-12 | SPEC |
Specification | 19 | View | |
| 2005-09-12 | CLM |
Claims | 3 | View | |
| 2005-09-12 | ABST |
Abstract | 1 | View | |
| 2005-09-12 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2005-09-12 | OATH |
Oath or Declaration filed | 3 | View | |
| 2005-09-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-09-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-09-12 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2005-09-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2005-09-12 | 136A |
Authorization for Extension of Time all replies | 2 | View | |
| 2005-09-12 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Jerzy P. Puchacz
Pleasanton, CA
Sasangan Ramanathan
San Ramon, CA
Manolito Q. Reyes
Poway, CA
Thomas E. Seidel
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
118/715
H10P72/0454
H10P72/0462
H10P72/7602
H10P72/7621
H10P72/3306
C23C16/45548
C23C16/4583
C23C16/54
Prosecution
- Examiner
- MOORE, KARLA A
- Art Unit
- 1792
- Customer No.
- 26263
- Docket No.
- 40004551-0051-002
- Confirmation No.
- 3737
Publication
- Pub. No.
- US20060137609A1
- Pub. Date
- 2006-06-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-03-06
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Quick Facts
- App. No.
- 11/224,767
- Filed
- 2005-09-12
- Pub. No.
- US20060137609A1
- Examiner
- MOORE, KARLA A
- Art Unit
- 1792
External Links