IP Library › Patent Application 60609598
Patent Application Provisional Small
App. No. 60/609,598 · Confirmation No. 5894

Multi-single wafer processing apparatus

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2004-09-13 TRNA Transmittal of New Application 3 View
2004-09-13 SPEC Specification 13 View
2004-09-13 CLM Claims 2 View
2004-09-13 DRW Drawings-only black and white line drawings 14 View
2004-09-13 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/609,598
Filed
2004-09-13