System to control an atmosphere between a body and a substrate
View Patent ↗The present invention is directed towards a system to control an atmosphere about a substrate, the system including, inter alia, a body spaced-apart from a surface of the substrate a distance; a supply of fluid coupled to introduce a flow between the body and the substrate; and a wall coupled to the body to create a resistance of the flow between first and second regions of the substrate, with a position of the wall being varied in response to a decrease in a magnitude of the distance.
1. A system to control an atmosphere about a substrate, said system comprising:
a body spaced-apart from a surface of said substrate a first distance;
a supply of fluid coupled to introduce a flow between said body and said substrate; and
a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance of said flow between first and second regions of said substrate, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance.
2. The system as recited in claim 1 further including a plurality of walls coupled to said body.
3. The system as recited in claim 1 wherein said supply of fluid further includes a conduit to introduce said fluid between said body and said substrate.
4. The system as recited in claim 1 wherein said supply of fluid further includes a plurality of conduits at differing locations to introduce said fluid between said body and said substrate.
5. The system as recited in claim 1 wherein said fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
6. The system as recited in claim 3 further including a pump system in fluid communication with said conduit.
7. The system as recited in claim 1 further including a motor in communication with said wall, with said motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.
8. The system as recited in claim 1 wherein said body comprises a template including a mold.
9. The system as recited in claim 1 wherein said wall surrounds a portion of said first region.
10. A system to control an atmosphere about a substrate, said system comprising:
a body spaced-apart from a surface of said substrate a first distance;
a supply of fluid coupled to introduce a flow between said body and said substrate; and
a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance of said flow between first and second regions of said substrate, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance to minimize a probability of contact between said wall and said substrate.
11. The system as recited in claim 10 further including a plurality of walls coupled to said body.
12. The system as recited in claim 10 wherein said supply of fluid further includes a conduit to introduce said fluid between said body and said substrate.
13. The system as recited in claim 10 wherein said supply of fluid further includes a plurality of conduits at differing locations to introduce said fluid between said body and said substrate.
14. The system as recited in claim 10 wherein said fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
15. The system as recited in claim 12 further including a pump system in fluid communication with said conduit.
16. The system as recited in claim 10 further including a motor in communication with said wall, with said motor being a solenoid selected from a group of solenoids comprising electric, pneumatic, and hydraulic.
17. A system to control an atmosphere about a substrate, said system comprising:
a body spaced-apart from a surface of said substrate a first distance;
a conduit in fluid communication with a pump system coupled to introduce a flow between said body and said substrate; and
a wall, spaced-apart from said surface of said substrate a second distance, coupled to said body to create a resistance to said flow between first and second regions of said substrate to control said atmosphere about said first region, with a magnitude of said second distance being increased in response to a decrease in a magnitude of said first distance.
18. The system as recited in claim 17 further including a plurality of walls coupled to said body.
19. The system as recited in claim 18 further including a plurality of conduits at differing locations.
20. The system as recited in claim 19 wherein said fluid is selected from a group of gases including helium, hydrogen, nitrogen, carbon dioxide, and xenon.
21. The system as recited in claim 17 wherein said fluid is selected from a group of gases including helium, hydrogen, carbon dioxide, and xenon.