System and method for processing an organic memory cell
View Patent ↗A system and method are disclosed for processing an organic memory cell. An exemplary system can employ an enclosed processing chamber, a passive layer formation component operative to form a passive layer on a first electrode, and an organic semiconductor layer formation component operative to form an organic semiconductor layer on the passive layer. A wafer substrate is not needed to transfer from a passive layer formation system to an organic semiconductor layer formation system. The passive layer is not exposed to air after formation of the passive layer and before formation of the organic semiconductor layer. As a result, conductive impurities caused by the exposure to air do not occur in the thin film layer, thus improving productivity, quality, and reliability of organic memory devices. The system can further employ a second electrode formation component operative to form a second electrode on the organic semiconductor layer.
1. A method of making an organic memory cell, comprising:
holding one or more substrates comprising a first electrode comprising copper in an enclosed processing chamber;
removing copper oxide on the first electrode by contacting the first electrode with a reducing agent or heating the first electrode in the enclosed processing chamber;
contacting a sulfide compound with the first electrode to form a passive layer comprising copper sulfide on the first electrode in the enclosed processing chamber;
forming an organic semiconductor layer on the passive layer in the enclosed processing chamber, wherein the passive layer is not exposed to air after formation of the passive layer and before formation of the organic semiconductor layer; and
forming a second electrode on the organic semiconductor layer in the enclosed processing chamber.
2. The method of claim 1 , wherein the organic semiconductor material comprises at least one selected from the group consisting of polyacetylene; polydiphenylacetylene; poly(t-butyl)diphenylacetylene; poly(trifluoromethyl)diphenylacetylene; polybis(trifluoromethyl)acetylene; polybis(t-butyldiphenyl)acetylene; poly(trimethylsilyl) diphenylacetylene; poly(carbazole)diphenylacetylene; polydiacetylene; polyphenylacetylene; polypyridineacetylene; polymethoxyphenylacetylene; polymethylphenylacetylene; poly(t-butyl)phenylacetylene; polynitro-phenylacetylene; poly(trifluoromethyl) phenylacetylene; poly(trimethylsilyl)pheylacetylene; polydipyrrylmethane; polyindoqiunone; polydihydroxyindole; polytrihydroxyindole; furane-polydihydroxyindole; polyindoqiunone-2-carboxyl; polyindoqiunone; polybenzobisthiazole; poly(p-phenylene sulfide); polyaniline; polythiophene; polypyrrole; polysilane; polystyrene; polyfuran; polyindole; polyazulene; polyphenylene; polypyridine; polybipyridine; polyphthalocyanine; polysexithiofene; poly(siliconoxohemiporphyrazine); poly(germaniumoxohemiporphyrazine); poly(ethylenedioxythiophene); polymetallocene complexes; and polypyridine metal complexes.
3. The method of claim 1 , wherein the second electrode comprises at least one selected from the group consisting of aluminum, chromium, cobalt, copper, germanium, hafnium, gold, magnesium, manganese, molybdenum, indium, iron, nickel, palladium, platinum, samarium, silver, titanium, tungsten, zinc, and alloys thereof; indium-tin oxide and indium zinc oxide and other conductive metal oxides and mixtures thereof; and metal silicides, metal carbides and metal nitrides.
4. The method of claim 1 , wherein forming the organic semiconductor layer is performed by chemical vapor deposition.
5. The method of claim 1 , wherein the one or more substrates are held in the enclosed processing chamber, the enclosed processing chamber being connected to a passive layer formation component, an organic semiconductor layer formation component, and a second electrode formation component.
6. The method of claim 1 , wherein the substrate is mounted onto a rotatable chuck in the enclosed processing chamber.
7. The method of claim 1 , wherein the substrate is not transferred from the enclosed processing chamber to another chamber while making the organic memory cell, and the layers are not exposed to air.
8. The method of claim 1 , wherein the first electrode is contacted with hydrogen sulfide to form the passive layer comprising copper sulfide for a time from about 1 second to about 60 minutes at a temperature from about 15° C. to about 500° C.
9. A method of processing an organic memory cell, comprising:
holding one or more substrates comprising a first electrode comprising copper in an enclosed processing chamber comprising a gas inlet, the gas inlet connected to an oxidation component for forming a cupper sulfide passive layer on a first electrode, a CVD component for forming an organic semiconductor layer on a passive layer, and a CVD component for forming a second electrode on an organic semiconductor layer;
contacting the electrode with ammonia to reduce copper oxide to copper and contacting the first electrode with a sulfide compound to form a passive layer comprising copper sulfide on the first electrode in the enclosed processing chamber using the oxidation component for forming a cupper sulfide passive layer;
forming an organic semiconductor layer on the passive layer in the enclosed processing chamber using the CVD component for forming an organic semiconductor layer, wherein the passive layer is not exposed to air after formation of the passive layer and before formation of the organic semiconductor layer; and
forming a second electrode on the organic semiconductor layer in the enclosed processing chamber using the CVD component for forming a second electrode;
wherein the substrate is not transferred from the enclosed processing chamber to another chamber while processing the organic memory cell, and the layers are not exposed to air.
10. The method of claim 9 , wherein the substrate is mounted onto a rotatable chuck in the enclosed processing chamber.
11. The method of claim 9 , wherein the first electrode is contacted with hydrogen sulfide to form the passive layer comprising copper sulfide for a time from about 1 second to about 60 minutes at a temperature from about 15° C. to about 500° C.
12. The method of claim 9 , wherein forming the organic semiconductor layer is performed by chemical vapor deposition.
13. The method of claim 9 , wherein the organic semiconductor material comprises at least one selected from the group consisting of polyacetylene; polydiphenylacetylene; poly(t-butyl)diphenylacetylene; poly(trifluoromethyl)diphenylacetylene; polybis(trifluoromethyl)acetylene; polybis(t-butyldiphenyl)acetylene; poly(trimethylsilyl) diphenylacetylene; poly(carbazole)diphenylacetylene; polydiacetylene; polyphenylacetylene; polypyridineacetylene; polymethoxyphenylacetylene; polymethylphenylacetylene; poly(t-butyl)phenylacetylene; polynitro-phenylacetylene; poly(trifluoromethyl) phenylacetylene; poly(trimethylsilyl)pheylacetylene; polydipyrrylmethane; polyindoqiunone; polydihydroxyindole; polytrihydroxyindole; furane-polydihydroxyindole; polyindoqiunone-2-carboxyl; polyindoqiunone; polybenzobisthiazole; poly(p-phenylene sulfide); polyaniline; polythiophene; polypyrrole; polysilane; polystyrene; polyfuran; polyindole; polyazulene; polyphenylene; polypyridine; polybipyridine; polyphthalocyanine; polysexithiofene; poly(siliconoxohemiporphyrazine); poly(germaniumoxohemiporphyrazine); poly(ethylenedioxythiophene); polymetallocene complexes; and polypyridine metal complexes.
14. The method of claim 9 , wherein the second electrode comprises at least one selected from the group consisting of aluminum, chromium, cobalt, copper, germanium, hafnium, gold, magnesium, manganese, molybdenum, indium, iron, nickel, palladium, platinum, samarium, silver, titanium, tungsten, zinc, and alloys thereof; indium-tin oxide and indium zinc oxide and other conductive metal oxides and mixtures thereof; and metal silicides, metal carbides and metal nitrides.