Method of making an inverted-T channel transistor
View Patent ↗A method for creating an inverse T field effect transistor is provided. The method includes creating a horizontal active region and a vertical active region on a substrate. The method further comprises forming a sidewall spacer on a first side of the vertical active region and a second side of the vertical active region. The method further includes removing a portion of the horizontal active region, which is not covered by the sidewall spacer. The method further includes removing the sidewall spacer. The method further includes forming a gate dielectric over at least a first part of the horizontal active region and at least a first part of the vertical active region. The method further includes forming a gate electrode over the gate dielectric. The method further includes forming a source region and a drain region over at least a second part of the horizontal active region and at least a second part of the vertical active region.
1. A method for creating an inverse T field effect transistor, comprising:
creating a horizontal semiconductor region and a vertical active region on a substrate, wherein the horizontal semiconductor region is on a top surface of a substrate, wherein the top surface of the substrate is an electrical insulator;
forming a sidewall spacer on a first side of the vertical active region and over a first part of the horizontal semiconductor region adjacent to the first side and leave an exposed first portion of the horizontal semiconductor region adjacent to the first part, and on a second side of the vertical active region and over a second part of the horizontal semiconductor region adjacent to the second side and leave an exposed second portion of the horizontal active region adjacent to the second part, wherein the first part is a first horizontal active region and the second part is a second horizontal active region;
etching away the first portion and the second portion of the horizontal active region through to the top surface of the substrate to leave the first horizontal active region and the second horizontal active region;
removing the sidewall spacer;
forming a gate dielectric over the first horizontal active region, the second horizontal active region, and at least a first part of the vertical active region;
forming a gate electrode over the gate dielectric; and
forming a source region and a drain region in portions of the first and second horizontal active regions and the vertical active region.
2. The method of claim 1 further comprising forming a liner on the first horizontal active region, the second horizontal active region, and the vertical active region.
3. The method of claim 2 , wherein the liner is used as an etch-stop layer for forming the sidewall spacer.
4. The method of claim 2 , wherein the liner comprises silicon oxide.
5. The method of claim 1 , wherein the sidewall spacer comprises one of silicon nitride or silicon oxide.
6. The method of claim 1 further comprising, after the step of etching, oxidizing a to portion of the first and second horizontal active regions.
7. The method of claim 1 , wherein the sidewall spacer has a base, which is substantially equal in terms of its width on each side of the vertical active region.
8. The method of claim 1 , wherein removing the sidewall spacer comprises using a wet-etch process.
9. The method of claim 1 , wherein the top surface of the substrate comprises silicon oxide.
10. The method of claim 1 , wherein a base width of the sidewall spacer is in a range from 10 Angstroms to 1000 Angstroms.
11. The method of claim 1 , wherein a height of the horizontal first and second horizontal active regions is smaller than a width of the vertical active region.