IP Library Patent Application 11270914
Patent Application Utility
App. No. 11/270,914 · Confirmation No. 8505

Multifrequency plasma reactor and method of etching

Inventor: Bradley J. Howard
Expressly Abandoned -- During Examination View Publication ↗
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2008-02-22 ABN Abandonment 2 View
2007-11-06 PGEA Request for Express Abandonment for refund or to avoid publication 1 View
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2007-08-21 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
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2007-03-14 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-11-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-09-14 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-07-31 A.PE Preliminary Amendment 1 View
2006-07-31 SPEC Specification 1 View
2006-07-31 ABST Abstract 1 View
2006-07-31 CLM Claims 3 View
2006-07-31 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-07-31 WFEE Fee Worksheet (SB06) 1 View
2006-02-06 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-11-10 TRNA Transmittal of New Application 2 View
2005-11-10 SPEC Specification 10 View
2005-11-10 CLM Claims 3 View
2005-11-10 ABST Abstract 1 View
2005-11-10 DRW Drawings-only black and white line drawings 6 View
2005-11-10 OATH Oath or Declaration filed 5 View
2005-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-11-10 WFEE Fee Worksheet (SB06) 1 View
2005-11-10 WFEE Fee Worksheet (SB06) 1 View
2005-11-10 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
11/270,914
Filed
2005-11-10
Pub. No.
US20060054596A1
Art Unit
1792