Apparatus for processing a substrate
View Patent ↗An apparatus includes a plasma process chamber and a support element capable of supporting a substrate inside the plasma process chamber. At least one plasma control element is placed adjacent to a peripheral portion of the support element such that the plasma control element is capable of influencing a plasma inside the plasma process chamber if an electric field is applied thereto. At least one voltage generator is connected to the plasma control element. The plasma control element is movable inside the process chamber such that it can be set to any of at least two different positions.
1. An apparatus adapted to process a substrate, the apparatus comprising:
a plasma process chamber;
a support element capable of supporting the substrate inside the plasma process chamber;
at least one plasma control element being placed adjacent to a peripheral portion of the support element such that the plasma control element is capable of influencing a plasma inside the plasma process chamber if an electric field is applied thereto, wherein the plasma control element is movable inside the plasma process chamber such that it can be set to any of at least two different positions; and
at least one voltage generator that is connected to the plasma control element,
wherein the plasma control element comprises a piezo-electric element capable of modifying the geometric configuration of the plasma control element, wherein the piezo-electric element comprises a first piezo-electric foil disposed inside the plasma control element and a second piezo-electric foil disposed at the outside of the plasma control element.
2. The apparatus according to claim 1 , wherein the plasma control element forms a collar that encircles the support element.
3. The apparatus according to claim 2 , wherein the collar is rotationally symmetric.
4. The apparatus according to claim 1 , wherein the at least one plasma control element comprises a plurality of plasma control elements that are arranged adjacent to the peripheral portion of the support element in a symmetric configuration.
5. The apparatus according to claim 4 , wherein the position of each plasma control element is individually adjustable.
6. The apparatus according to claim 5 , wherein each of the plurality of plasma control elements comprises a ring segment and wherein the ring segments encircle the support element in a collar-like configuration.
7. The apparatus according to claim 6 , wherein at least one of the ring segments includes a piezo-electric element capable of modifying the geometric configuration of the respective ring segment.
8. The apparatus according to claim 7 , wherein the piezo-electric element comprises a piezo-electric foil disposed inside the ring segment.
9. The apparatus according to claim 8 , wherein the ring segments are movable in a direction perpendicular to the substrate's surface.
10. The apparatus according to claim 9 ,
wherein an inner radius of the collar-like configuration is larger than an outer radius of the support element; and
wherein each ring segment is also movable in a plane being parallel to the substrate's surface.
11. The apparatus according to claim 1 , wherein the piezo-electric element comprises a piezo-electric foil disposed at the outside of a ring segment.
12. The apparatus according to claim 1 , wherein the plasma control element is movable in a direction perpendicular to the substrate's surface.
13. The apparatus according to claim 12 , wherein the plasma control element is movable in a plane being parallel to the substrate's surface.
14. A support capable of supporting a substrate in a plasma process chamber, the support comprising:
a support element capable of supporting the substrate in the plasma process chamber; and
at least one plasma control element adjacent to a peripheral portion of the support element, wherein the plasma control element is capable of influencing a plasma inside the plasma process chamber if an electric field is applied thereto, and wherein the plasma control element is movable such that it can be set to any of at least two different positions, wherein the plasma control element comprises a piezo-electric element capable of modifying the geometric configuration of the plasma control element, wherein the piezo-electric element comprises a first piezo-electric foil disposed inside the plasma control element and a second piezo-electric foil disposed at the outside of the plasma control element.
15. The support according to claim 14 , wherein the plasma control element comprises a plurality of plasma control elements that are arranged adjacent the peripheral portion of the support element in a symmetric configuration, and wherein each of the plurality of plasma control elements is formed as a ring segment such that the ring segments encircle the support element in a collar-like configuration.
16. The support according to claim 15 , wherein the position of each ring segment is individually adjustable.
17. The support according to claim 14 , wherein the plasma control element is movable in a direction perpendicular to the substrate's surface.
18. The support according to claim 17 , wherein the plasma control element is also movable in a plane being parallel to the substrate's surface.
19. The support according to claim 14 , wherein the piezo-electric element comprises a piezo-electric foil disposed outside of the plasma control element.
20. The support according to claim 14 , wherein the support comprises an electro-static chuck.
21. The apparatus according to claim 1 , wherein the at least one plasma control element comprises a single annular-shaped control element that surrounds a periphery of a location for the substrate.
22. The apparatus according to claim 1 , wherein the at least one plasma control element comprises at least two concentrically arranged annular-shaped control elements that surround a periphery of a location for the substrate.
23. The apparatus according to claim 1 , wherein a second piezo-electric foil is disposed at the outside of a ring segment.