Field transistor monitoring pattern for shallow trench isolation defects in semiconductor device
View Patent ↗A field transistor monitoring pattern has two active areas, i.e., a source region and a drain region, spaced apart from each other by an STI area intervening therebetween. The STI area is generally narrower than each active area. The monitoring pattern further has two gate patterns, each having a gate trunk and at least one gate branch extending from the gate trunk and crossing over both active areas. The monitoring pattern can be used to check an isolation property of the STI area by applying the same voltages to both gate patterns and then measuring leakage current between both active areas. Additionally, by applying different voltages to both gate patterns and detecting leakage current therebetween, the monitoring pattern can monitor unfavorable dimple defects potentially produced in the STI area.
1. A method of detecting a dimple defect in a shallow trench isolation (STI) structure, comprising:
applying a first voltage to a first gate pattern, the first gate pattern having a first gate trunk and at least one first gate branch extending from the first gate trunk and crossing over first and second active areas, the STI structure being between the first active area and the second active area;
applying a second voltage to a second gate pattern, the second gate pattern having a second gate trunk and at least one second gate branch extending from the second gate trunk and crossing over the first and second active areas;
measuring a current between the first and second gate patterns;
wherein each gate pattern has a plurality of gate branches extending from each gate trunk and crossing over both active areas.
2. The method of claim 1 , further comprising determining whether the current is above a threshold current.
3. The method of claim 2 , wherein the threshold current correlates to at least one dimple defect in the STI structure.
4. The method of claim 1 , wherein the first voltage is significantly greater than the second voltage.
5. The method of claim 1 , wherein the STI area has a width that does not exceed a quarter of a corresponding width of each active area.
6. The method of claim 1 , wherein the gate branches of the gate patterns are arranged in an alternating sequence.