Fan out type wafer level package structure and method of the same
View Patent ↗To pick and place standard dies on a new base for obtaining an appropriate and wider distance between dies than the original distance of dies on a wafer. The package structure has a larger size of balls array than the size of the die by fan out type package. Moreover, the die may be packaged with passive components or other dies with a side by side structure or a stacking structure.
1. A fan out type package structure, comprising:
an isolating base;
a first die adhered to said isolating base;
a first dielectric layer formed on said isolating base and filled in a space except said first die on said isolating base;
a second dielectric layer formed on said first dielectric layer and said first die, and said second dielectric layer having first openings on first pads of said first die;
a first contact conductive layer formed on said first openings to electrically coupling with said first pads, respectively;
a first conductive lines formed on said second dielectric layer and corresponding said first contact conductive layer, and said first conductive lines being extended out from corresponding said first contact conductive layer to corresponding first end points, wherein said corresponding first end points are inside a surface of said second dielectric layer;
a first isolation layer formed on said first conductive lines and said second dielectric layer, and said first isolation layer having second openings on said first conductive lines;
solder balls welded on said second openings and electrical coupling with said first conductive lines, respectively;
a second die adhered between said isolating base and said first dielectric layer in the vertical direction of said first die;
a third dielectric layer formed between said isolating base and said first dielectric layer;
a fourth dielectric layer formed among said first dielectric layer, said third dielectric layer, and said second die, and said second dielectric layer having third openings on second pads of said second die;
a second contact conductive layer formed on said third openings to electrically coupling with said second pads, respectively;
a second conductive lines formed among said first dielectric layer, said fourth dielectric layer, and corresponding said first contact conductive layer, and said second conductive lines extended out from corresponding said second contact conductive layer to corresponding second end points, wherein said corresponding second end points are inside a surface of said fourth dielectric layer;
a second isolation layer formed among said first conductive lines, said fourth dielectric layer, and said first dielectric layer;
fourth openings formed in said second isolation layer, said first dielectric layer, and said second dielectric layer on said second conductive lines; and
conductive material filled in fourth openings and electrical coupling with said first conductive lines and said second conductive lines, respectively.
2. The package structure in claim 1 , wherein surfaces of said third dielectric layer and said second die are at same level.
3. The package structure in claim 1 , wherein materials of said third dielectric layer and said fourth dielectric material layer comprise UV curing type material, heat curing type material, and the combination thereof.
4. The package structure in claim 1 , wherein said second contact conductive layer comprises Ti, Cu, and the combination thereof.
5. The package structure in claim 1 , wherein said second conductive lines comprises Ni, Cu, Au, and the combination thereof.
6. The package structure in claim 1 , further comprising at least one passive component on said isolating base.