Granted Patent B2

US 7,906,058 · App. 11/303,777 · Granted Mar 15, 2011

Abstract

Claims (38)

1. A method for spreading a conformable material between a substrate and an imprint template having a mold, said method comprising:

positioning said mold to be in superimposition with said substrate defining a volume therebetween, said substrate having a non-planar surface;

charging a first sub-portion of said volume with said conformable material through capillary action between said conformable material and one of said mold and said substrate;

deforming said mold to conform to said non-planar surface to fill a second sub-portion of said volume; and,

solidifying said conformable material, said solidified conformable material having a residual layer with substantially uniform thickness.

2. The method as recited in claim 1 wherein said template includes a first side, disposed opposite to said mold, with filling further including creating a pressure differential, such that a quantitative difference in pressure exists between said first side of said template as compared to a surface of said mold.

3. The method as recited in claim 1 wherein said mold includes a central portion and filling further includes contacting conformable material with said central portion and subsequently contacting the remaining portions of said mold with said conformable material.

4. The method as recited in claim 1 wherein said mold includes a neutral axis and charging further includes bowing said neutral axis before contacting said conformable material.

5. The method as recited in claim 1 wherein positioning further including centering said mold with respect to said substrate.

6. The method as recited in claim 1 wherein said mold has an area associated therewith that is greater than an area of said substrate.

7. The method as recited in claim 1 wherein said template includes a first side, disposed opposite to said mold, with charging said first sub-portion of said volume with said conformable material further including varying a distance between said mold and said substrate, while maintaining a substantially equal pressure on said first side and said mold.

8. A method for spreading a conformable material between a non-planar substrate and a template having a mold, said method comprising:

positioning said mold to be in superimposition with said substrate defining a volume therebetween;

charging a first sub-portion of said volume with said conformable material through capillary action between said conformable material and one of said mold and said substrate; and,

filling a second sub-portion of said volume by creating a deformation in said mold wherein charging occurs before filling.

9. The method as recited in claim 1 wherein said first sub-portion has a first volume and said second sub-portion has a second volume wherein said first volume and said second volume collectively are less than said volume defined by said mold in superimposition with said substrate.

10. A method for spreading a conformable material between a substrate and a template having a mold and a first side disposed opposite to said mold, said substrate having a non-planar surface, said method comprising:

positioning said mold to be in superimposition with said substrate defining a volume therebetween, with said mold having a central portion;

charging a first sub-portion of said volume with said conformable material through capillary action between said conformable material and one of said mold and said substrate by contacting said conformable material with said central portion; and

filling a second sub-portion of said volume by conforming said mold to said non-planar surface of said substrate by creating a pressure differential, such that a quantitative difference in pressure exists between said first side of said template as compared to a surface of said mold.

11. A method for spreading a conformable material between a non-planar substrate and a template having a mold, said method comprising:

positioning said mold to be in superimposition with said substrate defining a volume therebetween, with said mold having a central portion;

charging a first sub-portion of said volume with said conformable material through capillary action between said conformable material and one of said mold and said substrate by contacting said conformable material with said central portion; and

filling a second sub-portion of said volume by creating a deformation in said mold by creating a pressure differential, such that a quantitative difference in pressure exists between said first side of said template as compared to a surface of said mold;

wherein said mold includes a neutral axis and charging further includes bowing said neutral axis before contacting said conformable material.

12. The method as recited in claim 10 wherein positioning said mold to be in superimposition with said substrate further includes centering said mold with respect to said substrate.

13. The method as recited in claim 10 wherein charging the first sub-portion of said volume with said conformable material further includes varying a distance between said mold and said substrate, while maintaining a substantially equal pressure on said first side and said mold.

14. The method as recited in claim 10 wherein said first sub-portion has a first volume and said second sub-portion has a second volume wherein said first volume and said second volume collectively are less than said volume defined by said mold in superimposition with said substrate.

15. The method as recited in claim 1 wherein charging said first sub-portion of said volume with said conformable material occurs before deforming said mold to fill said second sub-portion of said volume.

16. A method for spreading conformable material over a substrate employing a template having a mold, said substrate having a non-planar surface with at least one hill and at least one trough, said method comprising:

placing said mold in superimposition with said conformable material;

generating capillary forces between said mold and a first portion of said conformable material, said first portion of said conformable material located on said hill of said non-planar surface with capillary forces being substantially absent between in the remaining portions of said conformable material and said mold; and

creating additional capillary forces between said mold and said remaining portions of said conformable material by deforming said mold to conform to said non-planar surface, whereby an imprinting layer having desired thicknesses is formed in said imprinting area.

17. The method as recited in claim 16 wherein said thicknesses include a height thickness and a residual thickness that differs from said height thickness.

18. The method as recited in claim 16 wherein said template includes a first side, disposed opposite to said mold, with creating additional capillary forces between said mold and said remaining portions of said conformable material further including forming a pressure differential, such that a quantitative difference in pressure exists between said first side of said template as compared to a surface of said mold.

19. The method as recited in claim 16 wherein said mold includes a central portion and generating capillary forces between said mold and a first portion of said conformable material further includes contacting said imprinting area with said central portion and subsequently contacting the remaining portions of said mold with said imprinting area.

20. The method as recited in claim 16 wherein said mold includes a neutral axis and generating capillary forces between said mold and a first portion of said conformable material further includes bowing said neutral axis and contacting said imprinting area after bowing said neutral axis.

21. The method as recited in claim 16 wherein placing said mold in superimposition with said conformable material further including centering said mold with respect to said substrate.

Assignments (11)