Semiconductor device and method for manufacturing the same
View Patent ↗A semiconductor device and a method manufacturing the same prevents copper from being exposed to a surface of a passivation film after a copper metal line formation, to avoid contamination of processing equipment and the process environment. The method includes providing a substrate with a scribe lane and a chip area in which metal wiring layers are formed, forming a dielectric film, forming a conductive film on the dielectric film in a chip area and an alignment mark on the dielectric film in a scribe lane, forming passivation films, exposing the conductive film by removing the passivation films in a bonding pad portion in a chip area, forming another conductive film in the bonding pad portion to electrically connect with the conductive film, forming another passivation film, and selectively removing the passivation films.
1. A method for manufacturing a semiconductor device, comprising:
providing a semiconductor substrate with a scribe lane and a chip area in which a plurality of metal wiring layers are formed;
forming a dielectric film on the semiconductor substrate;
forming a first conductive film on the dielectric film in the chip area;
forming an alignment mark on the dielectric film in the scribe lane;
forming a first passivation film and a second passivation film on an entire surface of the semiconductor substrate including the first conductive film and the alignment mark sequentially, wherein the first passivation film and the second passivation film have different etch selectivities;
exposing the first conductive film by removing the first passivation film and the second passivation film corresponding to a portion for a bonding pad in the chip area;
forming a second conductive film on the portion for the bonding pad to electrically connect with the first conductive film;
forming a third passivation film on the entire surface of the semiconductor substrate including the second conductive film;
selectively removing the third passivation film of the portion for the bonding pad; and
selectively removing the second passivation film and the third passivation film in the scribe lane.
2. The method of claim 1 , wherein the first conductive film and the alignment mark are formed of copper.
3. The method of claim 1 , wherein the first passivation film is a silicon nitride film and the second passivation film is a tetra-ethyl-ortho-silicate oxide film.
4. The method of claim 1 , wherein the second conductive film is formed of aluminum.