Optical dry-films and methods of forming optical devices with dry films
View Patent ↗Provided is a dry-film suitable for use in forming an optical component. The dry-film includes a carrier substrate having a front surface and a back surface. A negative-working photoimageable polymeric layer is disposed over the front surface of the carrier substrate, and includes a photoactive component and units of the formula (RSiO 1.5 ), wherein R is a substituted or unsubstituted organic group. In each of the units, R is free of hydroxy groups. The units include units of the formula (R 1 SiO 1.5 ) and (R 2 SiO 1.5 ), wherein R 1 is a substituted or unsubstituted aliphatic group and R 2 is a substituted or unsubstituted aromatic group. A protective cover layer is disposed over the front surface or back surface of the carrier substrate. Also provided are methods of forming optical devices with dry-films. The invention finds particular applicability in the optoelectronics industry.
1. A dry-film suitable for use in forming an optical component, comprising:
a carrier substrate having a front surface and a back surface;
a negative-working photoimageable polymeric layer over the front surface of the carrier substrate, comprising a photoactive component and units of the formula (RSiO 1.5 ), wherein R is a substituted or unsubstituted organic group, and wherein in each of said units, R is free of hydroxy groups, and wherein said units comprise units of the formula (R 1 SiO 1.5 ) and (R 2 SiO 1.5 ), wherein R 1 is a substituted or unsubstituted aliphatic group and R 2 is a substituted or unsubstituted aromatic group; and
a protective cover layer over the front or back surface of the carrier substrate.
2. The dry-film of claim 1 , wherein the carrier substrate is a polymeric film.
3. The dry-film of claim 1 , wherein the dry-film is in a rolled configuration.
4. The dry-film of claim 3 , wherein the protective cover layer is disposed over the back surface of the carrier substrate.
5. A method of forming an optical device, comprising:
(a) applying over a first substrate a dry-film comprising a carrier substrate and a negative-working photoimageable polymeric layer, the photoimageable polymeric layer comprising a photoactive component and units of the formula (RSiO 1.5 ), wherein R is a substituted or unsubstituted organic group, and wherein in each of said units, R is free of hydroxy groups, and wherein said units comprise units of the formula (R 1 SiO 1.5 ) and (R 2 SiO 1.5 ), wherein R 1 is a substituted or unsubstituted aliphatic group and R 2 is a substituted or unsubstituted aromatic group; and
(b) after (a), exposing at least a portion of the photoimageable polymeric layer to actinic radiation.
6. The method of claim 5 , wherein the optical device is an optical waveguide, the method further comprising developing the exposed photoimageable polymeric layer, to form an optical waveguide core structure.
7. The method of claim 6 , further comprising providing a bottom clad layer over the first substrate before (a), and providing an upper clad layer over the bottom clad layer and the core structure.
8. The method of claim 7 , wherein the bottom clad layer and/or the upper clad layer are formed by applying over the first substrate a respective bottom or upper clad dry-film, comprising a carrier substrate and a negative-working photoimageable polymeric layer comprising units of the formula (R 3 SiO 1.5 ), wherein R 3 is a substituted or unsubstituted organic group.
9. The method of claim 8 , further comprising exposing the bottom and/or upper clad dry-film to actinic radiation.
10. The method of claim 5 , wherein the first substrate is a printed wiring board substrate.