CMOS image sensor and method for fabricating the same
View Patent ↗A CMOS image sensor includes a first conductive type semiconductor substrate having an active region and a device isolation region, a device isolation film formed in the device isolation region of the semiconductor substrate, a second conductive type diffusion region formed in the active region of the semiconductor substrate, and an ion implantation prevention layer formed in the vicinity of the device isolation film, including a boundary portion between the device isolation film and the second conductive type diffusion region.
1. A method for fabricating a CMOS image sensor comprising:
sequentially forming an oxide film and a nitride film on a first conductive type semiconductor substrate having an active region and a device isolation region;
selectively etching the nitride film and the oxide film using a mask layer to expose the device isolation region of the semiconductor substrate and form a polymer at sides of the etched nitride and oxide films;
forming a trench on a surface of the exposed semiconductor substrate using the mask layer and the polymer as masks;
removing the mask layer and the polymer;
forming an ion implantation prevention layer in the surface of the semiconductor substrate in which the trench is formed by implanting first conductive type impurity ions into the surface of the semiconductor substrate using the nitride film and the oxide film as masks, wherein the first conductive type impurity ions are vertically implanted into the device isolation region such that the ion implantation prevention layer has a layer at a bottom of the trench that is thicker than a layer along sidewalls of the trench;
forming a device isolation film in the trench;
removing the nitride film and the oxide film; and
forming a second conductive type diffusion region in the active region of the semiconductor substrate to be separated from the device isolation film by the ion implantation prevention layer.
2. The method according to claim 1 , wherein the polymer is formed by etching the nitride film using a CF 4 gas.
3. The method according to claim 1 , wherein the polymer has a thickness of about 200 Å to about 500 Å.
4. The method according to claim 1 , wherein the first conductive type impurity ions implanted to form the ion implantation prevention layer are at least one of B ions or BF 2 ions.
5. The method according to claim 1 , further comprising forming an oxide film in a surface of the trench.
6. The method according to claim 1 , further comprising forming a first conductive type diffusion region on the second conductive type diffusion region.
7. A method for fabricating a CMOS image sensor comprising:
sequentially forming an oxide film and a nitride film on a first conductive type semiconductor substrate having an active region and a device isolation region;
selectively etching the nitride film and the oxide film to expose the device isolation region of the semiconductor substrate;
forming spacers at sides of the nitride and oxide films;
forming a trench on a surface of the exposed semiconductor substrate using the nitride film and the spacers as masks;
removing the spacers;
forming an ion implantation prevention layer in the surface of the semiconductor substrate in which the trench is formed by implanting first conductive type impurity ions into the surface of the semiconductor substrate using the nitride film and the oxide film as masks, wherein the first conductive type impurity ions are vertically implanted into the device isolation region such that the ion implantation prevention layer has a layer at a bottom of the trench that is thicker than a layer along sidewalls of the trench;
forming a device isolation film in the trench;
removing the nitride film and the oxide film; and
forming a second conductive type diffusion region in the active region of the semiconductor substrate to be separated from the device isolation film by the ion implantation prevention layer.
8. The method according to claim 7 , wherein the step of forming spacers includes:
forming an oxide insulating film on the surface of the semiconductor substrate including the nitride film; and
etching back the oxide insulating film to form the spacers.
9. The method according to claim 7 , wherein the first conductive type impurity ions implanted to form the ion implantation prevention layer are at least one of B ions and BF 2 ions.
10. The method according to claim 7 , further comprising forming an oxide film in a surface of the trench.
11. The method according to claim 7 , further comprising forming a first conductive type diffusion region on the second conductive type diffusion region.