Microlens of CMOS image sensor and method of manufacturing the same
View Patent ↗A method of a microlens of a CMOS image sensor eliminates a flattened gap between the curvatures of adjacent microlenses. A plurality of color filter layers is formed on a semiconductor substrate on which a photodiode region, a gate electrode, an interlayer insulating layer, and a metal interconnection are formed. An overcoating layer is formed on the plurality of color filter layers. Microlenses are formed on the overcoating layer. The overcoating layer exposed by a gap between the microlenses is etched to form a gap at the boundary between the color filter layers in the overcoating layer. A flow process is performed such that curves of the microlenses extend to the gap.
1. A method of manufacturing a microlens structure of a CMOS image sensor, comprising:
forming a plurality of color filter layers on a semiconductor substrate on which a photodiode region, a gate electrode, an interlayer insulating layer, and a metal interconnection are formed;
forming an overcoating layer on the plurality of color filter layers;
forming microlenses on the overcoating layer;
etching the overcoating layer exposed by a first gap between the microlenses to form a second gap between the color filter layers in the overcoating layer; and
performing a reflow process such that curves of the microlenses extend to the second gap.
2. The method according to claim 1 , wherein the flow process is performed on a portion of the overcoating layer and the microlenses such that the curves of the microlenses extend to the second gap.
3. The method according to claim 1 , wherein the overcoating layer is etched using O 2 plasma.