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App. No. 11/320,396 · Confirmation No. 9589

Method for forming an intermetal dielectric layer in a semiconductor device using HDP-CVD, and a semiconductor device manufactured thereby

Inventor: June Woo Lee
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-12-29 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2009-12-29 ABN Abandonment 1 View
2009-06-05 FWCLM Index of Claims 1 View
2009-06-05 SRFW Search information including classification, databases and other search related notes 1 View
2009-06-05 SRNT Examiner's search strategy and results 2 View
2009-06-05 CTFR Final Rejection 8 View
2009-03-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-03-18 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2009-03-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-12-18 CTNF Non-Final Rejection 6 View
2008-12-18 892 List of references cited by examiner 1 View
2008-12-18 FWCLM Index of Claims 1 View
2008-12-18 SRFW Search information including classification, databases and other search related notes 1 View
2008-12-18 SRNT Examiner's search strategy and results 2 View
2008-09-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-09-12 SPEC Specification 1 View
2008-09-12 CLM Claims 2 View
2008-09-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2008-09-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-09-12 WFEE Fee Worksheet (SB06) 1 View
2008-06-12 CTNF Non-Final Rejection 7 View
2008-06-12 892 List of references cited by examiner 1 View
2008-06-12 FWCLM Index of Claims 1 View
2008-06-12 SRFW Search information including classification, databases and other search related notes 1 View
2008-06-12 BIB Bibliographic Data Sheet 1 View
2008-06-12 SRNT Examiner's search strategy and results 3 View
2008-05-27 SRNT Examiner's search strategy and results 1 View
2008-05-27 SRNT Examiner's search strategy and results 1 View
2007-08-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2007-06-27 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2007-06-21 PA.. Power of Attorney 2 View
2007-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-11-15 PETDEC Petition Decision 3 View
2006-11-15 BIB Bibliographic Data Sheet 1 View
2006-11-15 N578 Notification of Withdrawal of Attorney 1 View
2006-08-23 PET.OP Petition for review by the Office of Petitions 2 View
2006-08-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-12-29 TRNA Transmittal of New Application 2 View
2005-12-29 SPEC Specification 8 View
2005-12-29 CLM Claims 3 View
2005-12-29 ABST Abstract 1 View
2005-12-29 DRW Drawings-only black and white line drawings 3 View
2005-12-29 OATH Oath or Declaration filed 3 View
2005-12-29 WFEE Fee Worksheet (SB06) 1 View
2005-12-29 WFEE Fee Worksheet (SB06) 1 View
2005-12-29 ADS Application Data Sheet 2 View
2005-12-29 FRPR Certified Copy of Foreign Priority Application 20 View
2005-12-29 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
11/320,396
Filed
2005-12-29
Pub. No.
US20060138667A1
Art Unit
2813