Flash memory device and method for fabricating the same
View Patent ↗A flash memory device includes a source region formed in an active region of a semiconductor substrate; a recessed region formed in the active region on either side of the source region, the recessed region including a recess surface having sidewalls; floating gates formed at the sidewalls of the recess surface by interposing a tunnel insulating film; a source line formed on the source region across the active region; and control gate electrodes formed at sidewalls of the source line across a portion of the active region where the floating gates are formed. The floating gates and the control gate electrodes are formed by anisotropically etching a conformal conductive film to have a spacer structure. Cell transistor size can be reduced by forming a deposition gate structure at both sides of the source line, and short channel effects can be minimized by forming the channel between the sidewalls of a recess surface.
1. A method for fabricating a flash memory device, comprising:
defining an active region in a semiconductor substrate;
forming a source region in the active region;
forming a source line on the source region across the active region;
forming a recessed region in the active region by etching the semiconductor substrate at both sidewalls of the source region;
forming floating gates at sidewalls of the recessed region by interposing a tunnel insulating film; and
forming control gate electrodes across the active region above the floating gates by interposing a gate interlayer dielectric film.
2. The method as claimed in claim 1 , wherein the source line is formed with a width smaller than the source region.
3. The method as claimed in claim 1 , said floating gate forming comprising:
forming the tunnel insulating film at the sidewalls of the recessed region and the sidewalls of the source line;
forming a floating gate conductive film on an entire substrate surface, conforming to the entire substrate; and
anisotropically etching the floating gate conductive film.
4. The method as claimed in claim 1 , said control gate forming comprising:
forming a gate interlayer dielectric film on an entire substrate surface, conforming to the entire substrate;
forming a control gate conductive film on the gate interlayer dielectric film, conforming to the entire substrate; and
anisotropically etching the control gate conductive film.
5. The method as claimed in claim 1 , further comprising:
forming a drain region aligned with the control gate electrodes by implanting impurity ions to the active region.