Fabrication method of semiconductor integrated circuit device
View Patent ↗A method of fabricating a semiconductor integrated circuit device uses a mold which is provided with a plurality of air vents and movable pins which are formed such that the movable pins include grooves in the distal ends thereof which project into the air vents. By clamping the mold in a state such that the distal ends of the movable pins are pushed against a multi-cavity board at the time of clamping the mold, resin can be filled while leaking air inside the cavity through the grooves formed in the distal ends of the movable pins by setting the depths of the respective air vents to a fixed value irrespective of the irregularities in thickness of the multi-cavity boards. Accordingly, it is possible to prevent insufficient filling of resin in the cavity, the leaking of resin or defective welding, whereby the yield rate of products can be enhanced.
1. A fabrication method of a semiconductor integrated circuit device, comprising the steps of:
(a) preparing a printed circuit board having a plurality of device forming portions on its first major surface;
(b) mounting a semiconductor chip within each device forming portion;
(c) arranging the thus chip-mounted printed circuit board between an upper mold block and a lower mold block, and thereafter closing the mold blocks so that a plurality of mold cavities, between the mold blocks, correspond respectively to the device forming portions; and
(d) filling sealing resin in the mold cavities communicating respectively with a plurality of air vents, while setting a depth of each air vent to a fixed value by a movable air vent portion.
2. A fabrication method of a semiconductor integrated circuit device according to claim 1 , wherein the movable air vent portion is a movable pin having a recess portion in a lower end surface thereof so as to form a passage as a part of the air vents in step (d).
3. A fabrication method of a semiconductor integrated circuit device according to claim 2 , wherein the movable pin is pressed against the major surface of the printed circuit board in step (d).