Integrated circuit using FinFETs and having a static random access memory (SRAM)
View Patent ↗An integrated circuit includes a logic circuit and a memory cell. The logic circuit includes a P-channel transistor, and the memory cell includes a P-channel transistor. The P-channel transistor of the logic circuit includes a channel region. The channel region has a portion located along a sidewall of a semiconductor structure having a surface orientation of (110). The portion of the channel region located along the sidewall has a first vertical dimension that is greater than a vertical dimension of any portion of the channel region of the P-channel transistor of the memory cell located along a sidewall of a semiconductor structure having a surface orientation of (110).
1. An integrated circuit, comprising:
a memory circuit comprising:
a first P-channel transistor, wherein the first P-channel transistor includes a first channel region;
a first N-channel transistor coupled to the first P channel transistor, wherein the first N-channel transistor includes a second channel region; and
a second N channel transistor functioning as a pass transistor coupled to the first P channel transistor and the first N channel transistor;
a logic circuit comprising:
a second P-channel transistor, the second P-channel transistor includes a third channel region, the third channel region includes a portion located along a first sidewall of a first semiconductor structure, the first sidewall of the first semiconductor structure having a surface orientation of (110), the portion of the third channel region along the first sidewall has a first vertical dimension, wherein the hole transport of the third channel region is in a generally horizontal direction, wherein the first semiconductor structure has a top surface with a surface orientation of (100);
wherein:
the first channel region includes a portion located along a second sidewall of the second semiconductor structure, the second sidewall of the second semiconductor structure has a surface orientation of (110), the portion of the first channel region along the second sidewall has a second vertical dimension, the second vertical dimension is less than the first vertical dimension, the second semiconductor structure has a top surface with a surface orientation of (100), and
the second channel region includes a portion located along a third sidewall of a third semiconductor structure, the third sidewall of the third semiconductor structure has a surface orientation of (100), the structure has a top surface with a surface orientation of (100).
2. The integrated circuit of claim 1 , wherein the first N-channel transistor has a greater transistor strength than a transistor strength of the first P-channel transistor.
3. An integrated circuit, comprising:
a substrate;
a memory circuit comprising:
a first P-channel transistor, wherein the first P-channel transistor includes a first channel region in a first semiconductor structure above the substrate, wherein the first channel region has sidewalls, a top surface, and a first effective width;
a first N-channel transistor coupled to the first P channel transistor; and
a second N channel transistor functioning as a pass transistor;
a logic circuit comprising:
a second P-channel transistor having a second channel region located in a second semiconductor structure above the substrate, wherein:
the second channel region has a top surface having a surface orientation of (100) and sidewalls;
the sidewalls of the second channel region have a surface orientation of (110);
the second channel region has a width along the sidewalls;
the width along the sidewalls of the second channel region is greater than a total of the first effective width that has a surface orientation of (110);
wherein:
the first N-channel transistor has a third channel region located in a third semiconductor structure; and
the third channel region has a top surface having a surface orientation of (100) and sidewalls having a surface orientation of (100).
4. A method of forming an integrated circuit, the method comprising:
forming a first P-channel transistor of a memory circuit, the first P-channel transistor has a first channel region;
forming a second P-channel transistor of a logic circuit of an integrated circuit, wherein the second P-channel transistor includes a second channel region, the second channel region includes a portion having first vertical dimension located along a first sidewall of a first semiconductor structure having a surface orientation of (110), the first semiconductor structure has a top surface having a surface orientation of (100);
a first N-channel transistor of the memory circuit functioning as a pass transistor, wherein the first N-channel transistor includes a third channel region, the third channel region includes a portion having first vertical dimension located along a first sidewall of a second semiconductor structure having a surface orientation of (100), the second semiconductor structure has a top surface having a surface orientation of (100); and
a second N-channel transistor of the memory circuit coupled to the first P-channel transistor;
wherein the first vertical dimension is greater than any portion of the first channel region located along a sidewall of a third semiconductor structure having a surface orientation of (110).